Galvanometer dimming tool, method and device

Abstract

The invention discloses a galvanometer dimming tool, method and device. The galvanometer dimming tool comprises a body and a dimming structure, the body is provided with a through cavity extending in the axial direction, the dimming structure is arranged in the through cavity and comprises a first dimming plate and a second dimming plate, and the first dimming plate and the second dimming plate are the same in structure; and the two opposite side walls of the first dimming plate are connected to the inner wall of the through cavity, the two opposite side walls of the second dimming plate are connected to the inner wall of the through cavity, the middle of the first dimming plate and the middle of the second dimming plate intersect, and the intersection of the first dimming plate and the second dimming plate is located on the axis of the through cavity. According to the galvanometer dimming tool, the dimming structure has a certain axial length, after the light beam penetrates through the dimming structure and is projected, the deflection angle error of the light beam can be amplified, accurate dimming operation is carried out by observing projection of the dimming structure, accurate dimming can be achieved only by installing the galvanometer dimming tool at an outlet or an inlet of a galvanometer, and the galvanometer dimming tool can be used in different processing environments and is high in adaptability.

Description

technical field [0001] The invention relates to the field of optical technology, in particular to a vibrating mirror light adjustment tool, method and device. Background technique [0002] At present, in laser processing equipment, the laser path of the optical path system often passes through multiple components, and the installation position of the intermediate components will directly affect the concentricity of the optical path. In order to ensure that the laser can be applied perpendicularly to the surface of the processed workpiece through the galvanometer, the galvanometer needs to be adjusted with the help of a light adjustment tool to ensure the concentricity of the galvanometer and the laser light. [0003] The debugging tool in the related art needs to be installed at the entrance and exit of the galvanometer at the same time, and judge whether the laser light is vertical by the degree of overlap of the shadow of the debugging tool under the laser light, but becau...

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Problems solved by technology

[0004] Embodiments of the present invention provide a vibrating mirror light adjustment tool, method, and device to solve the problem in the prior art that adjustment tools need to be installed at the entrance and exit of the vibrating mirror at the same time, and it is difficult to adapt to the actual processing environment, resulting in difficulty in adjusting the vibration Technical issues of precise dimming calibration of mirrors

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