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Differential mems gas sensor

A gas sensor and sensor technology, applied in the direction of instruments, scientific instruments, analytical materials, etc., can solve the problem that the measurement accuracy cannot meet the requirements of monitoring purposes, and achieve the effects of reducing influence, improving resolution, and improving accuracy

Active Publication Date: 2022-04-01
智感技术(天津)有限公司
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  • Abstract
  • Description
  • Claims
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AI Technical Summary

Problems solved by technology

However, the measurement accuracy of the currently disclosed MEMS gas sensor technology cannot meet the requirements of monitoring applications.

Method used

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Embodiment Construction

[0019] It should be noted that, in the case of no conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other.

[0020] The present invention will be described in detail below with reference to the accompanying drawings and examples.

[0021] The present invention provides the specific structural forms of the two groups of chambers that construct the sensor. As shown in the figure, the sensor of the present invention includes a substrate layer 1, a chip layer 2, a cavity wall layer 3, an encapsulating upper shell 4 and a water-proof and breathable chamber. filter membrane 5;

[0022] The substrate layer 1, the chip layer 2 and the cavity wall layer 3 are stacked and fixed sequentially from bottom to top, the bottom surface of the surrounding side walls of the packaging upper shell 4 is sealed and fixed with the substrate layer 1, and the upper cover plate of the packaging upper shell 4 is superimposed on the cavity wal...

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Abstract

The invention provides a differential MEMS gas sensor, which is provided with two sets of chamber groups whose cavity space is mirror-symmetrical and arranged on the same layer, and each group of the chamber groups respectively includes an air chamber cavity and an acoustic chamber cavity which are communicated with each other; Each sound chamber is provided with a microphone for detecting sound signals; each group of chambers communicates with the atmosphere outside the differential MEMS gas sensor only through a plurality of ventilation holes provided on the top cavity wall of the gas chamber. The air chamber cavity of one of the chamber groups is also equipped with a laser assembly, and the laser energy generated by the laser assembly is injected into the air chamber cavity. The invention adopts the differential design of double air chambers, which greatly reduces the influence of environmental noise on the measurement, and has high precision and small volume.

Description

technical field [0001] The invention belongs to the technical field of MEMS gas sensors, in particular to a MEMS (micro-electromechanical system) gas sensor using a differential test method. Background technique [0002] In recent years, with the continuous expansion of environmental protection efforts and scope, air quality has been greatly improved, and air quality monitoring has also begun to expand to indoor monitoring. Indoor air quality monitoring does not require lower measurement accuracy than atmospheric air quality monitoring, but the equipment is smaller in size and can even be carried around. [0003] Existing gas concentration detection equipment includes spectrometers, electrochemical sensors, MEMS sensors, chemical analyzers, etc. Spectrometers are expensive, bulky, and have high environmental requirements. Electrochemical sensors have low precision and serious drift. Chemical analyzers are slow to measure, complicated to operate, and large in size, so they...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N21/17G01N21/31
CPCG01N21/1702G01N21/31G01N2021/1704
Inventor 高建民李东光张雪岭俞晓涛卢美娟胥海艳樊海春张涛
Owner 智感技术(天津)有限公司
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