High-temperature pressure sensor and preparation method thereof

Abstract

The invention relates to the technical field of high-temperature pressure sensors, and discloses a high-temperature pressure sensor and a preparation method thereof. The high-temperature pressure sensor comprises a sensor head and a conversion circuit board which are connected with each other. The sensor head comprises a packaging shell and a sensitive microstructure arranged in a cavity; a frontclamping ring which is arranged at the front end in the cavity and is used for limiting the front end of the sensitive microstructure; a rear clamping ring which is arranged at the rear end of the cavity and is used for limiting the rear end of the sensitive microstructure; a conversion circuit board arranged in the sleeve shell; a high-temperature wire tube shell, of which one end is connected with the packaging shell through a connecting part, and the other end is connected with the sleeve shell; and a high-temperature wire that penetrates through the high-temperature wire tube shell, wherein one end of the high-temperature wire extends into the packaging shell to be connected with the sensitive microstructure, and the other end of the high-temperature wire extends into the sleeve shellto be connected with the conversion circuit board. According to the high-temperature pressure sensor and the preparation method thereof, high-precision dynamic measurement of the pressure sensor in afull-temperature area of -40 to 1000 DEG C is realized.

Description

technical field [0001] The invention relates to the technical field of high-temperature pressure sensors, in particular to a high-temperature pressure sensor and a preparation method thereof. Background technique [0002] The high-temperature pressure sensor is to measure the pressure of various gases and liquids in a high-temperature environment, and has broad application prospects in the fields of civil industry and national defense and military industry. For example, it can be used for pressure measurement in smelting towers and high-temperature oil wells for civil use; it can be used for pressure measurement of heat-resistant cavities and surface parts such as aero-engines in military use. The measurement of pressure parameters under high temperature conditions is the key technical "bottleneck" that restricts the development and operation of large-scale equipment such as advanced engines in the aviation and aerospace fields. How to realize accurate in-situ pressure measu...

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Problems solved by technology

[0004] The invention provides a high-temperature pressure sensor and a preparation method thereof. In order to overcome the defects of the above-mentioned various types of sensors, such as large temperature drift, poor dynamic performance, and difficulty in working in a high-temperature environment for a long time, ensure that the sensor can accurately measure pressure in situ under a high-temperature environment. The present invention adopts temperature-pressure integrated sensitive microstructure, unique high-temperature signal transmission mode, packaging structure and temperature compensation system to realize high-precision dynamic measurement of pressure sensor in the whole temperature range of -40°C-1000°C

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