Shearing speckle interference system based on integrated phase shift reflector
A speckle interference and mirror technology, used in measuring devices, instruments, optical devices, etc., can solve the problems of strong anti-interference, inability to take into account high laser utilization rate, large field of view, etc., and achieve the utilization rate of object light. high effect
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[0025] The present invention is a shearing speckle interference system based on an integrated phase-shift shearing mirror, comprising: an integrated phase-shifting shearing mirror 1, a camera 2, a laser 3 and a beam expander 4; the laser 3 emits laser light After passing through the beam expander 4, the measured object 5 is illuminated, and the object light is obtained after being reflected by the measured object 5; Cutting light: the phase-shifted light and the shearing light enter the camera 2 for interference imaging, so as to realize shearing speckle interferometry.
[0026] The integrated phase-shift shear mirror 1 is a reflector system comprising a phase shift mirror 101, a phase shifter 102, a shear mirror 103, a shear adjustment device 104 and a base 105; the phase shift mirror 101 is connected with the phase shifter 102 The base 105 is connected, and the shear mirror 103 is connected with the base 105 through the shear adjustment device 104 . The shear mirror 103 is ...
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