Photoelectric chip packaging structure and packaging method thereof
A packaging structure, optoelectronic chip technology, applied in the direction of light guide, optics, optical components, etc., to achieve the effect of improving reliability, not easy to warp, and improving performance
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[0035] As mentioned in the background, the performance of the existing optoelectronic chip packaging structure is relatively poor.
[0036] An optoelectronic chip packaging structure, such as figure 1 , including: an optical chip, the optical chip includes an optical core semiconductor substrate 110 and an optical interconnection structure 111; an electrical chip 150 (150-1, 150-2); a cover plate 160; a plastic sealing layer 170; a conductive connector 120; A wiring layer 130 ; a second wiring layer 140 ; solder balls 180 .
[0037]In the above optoelectronic chip packaging structure, one side of the optical interconnection structure 111 has an optical coupling area, and a mode spot converter is provided in the optical optical coupling area. The material of the cover plate 160 is usually glass, and the cover plate 160 is not in contact with the optical coupling area. , but the gap between the cover plate 160 and the optical coupling region forms a cavity. There is a cavity...
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