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Pressure tank

A pressure tank and tank body technology, which is applied in the field of pressure tanks, can solve the problems of impurities mixed with chemicals, high requirements on cleanliness of pressure tanks, and easy falling off of anti-corrosion materials, so as to achieve the effect of improving cleanliness.

Active Publication Date: 2020-12-04
CHANGZHOU RUIZE MICROELECTRONICS +1
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] Acidic or alkaline agents are used in the wet cleaning process, and the storage and cleaning output of these agents are carried out in pressure tanks; especially in the wet process in the semiconductor field, the cleanliness requirements of pressure tanks Higher, the existing pressure tank directly stores the medicament in the tank coated with anti-corrosion material on the inner wall, and the anti-corrosion material is easy to fall off, causing the tank to be easily corroded by the medicament, and impurities are mixed in the medicament, and the cleanliness is not high. Therefore, need badly a kind of novel pressure tank

Method used

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Embodiment Construction

[0023] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0024] The object of the present invention is to provide a pressure tank to solve the problems in the prior art, improve the cleanliness of stored medicine and prolong the service life of the pressure tank.

[0025] In order to make the above objects, features and advantages of the present invention more comprehensible, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.

[002...

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Abstract

The invention discloses a pressure tank, and relates to the technical field of high-pressure storage equipment. The pressure tank comprises a pressure tank body and pressurizing / depressurizing equipment, the pressure tank body comprises a tank body, an inner barrel body and a cover body, one end of the tank body and one end of the inner barrel body are opened, the tank body arranged outside the inner barrel body in a sleeving mode, and the openings of the tank body and the inner barrel body are arranged in the same direction. The cover body is detachably connected to the tank body and can sealthe inner barrel body and the tank body, and the pressurizing / depressurizing end of the pressurizing / depressurizing equipment can pressurize or depressurize the interior of the inner barrel body and / or the tank body. A liquid inlet and a liquid outlet are further formed in the pressure tank body, the inner barrel body is made of a corrosion-resistant material, and the tank body is made of a high-pressure-resistant material. According to the pressure tank, the cleanliness of chemicals stored in the pressure tank can be improved, and the service life of the pressure tank can be prolonged.

Description

technical field [0001] The invention relates to the technical field of high-pressure storage equipment, in particular to a pressure tank. Background technique [0002] Acidic or alkaline agents are used in the wet cleaning process, and the storage and cleaning output of these agents are carried out in pressure tanks; especially in the wet process in the semiconductor field, the cleanliness requirements of pressure tanks Higher, the existing pressure tank directly stores the medicament in the tank coated with anti-corrosion material on the inner wall, and the anti-corrosion material is easy to fall off, causing the tank to be easily corroded by the medicament, and impurities are mixed in the medicament, and the cleanliness is not high. Therefore, need badly a kind of novel pressure tank. Contents of the invention [0003] The object of the present invention is to provide a pressure tank to solve the above-mentioned problems in the prior art, improve the cleanliness of the ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F16J12/00H01L21/67
CPCF16J12/00H01L21/6704
Inventor 徐飞邬治国沈健华卫群尤春
Owner CHANGZHOU RUIZE MICROELECTRONICS
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