Method for online detection of film thickness and humidity based on frequency offset and consumption offset

Abstract

The invention provides a method for online detection of film thickness and humidity based on frequency offset and consumption offset. The thin film thickness information calculation formula is as follows: H = K * delta + b, H represents the thin film thickness, K represents the calibrated constant, delta represents the frequency offset obtained by the collector, and b represents the calibrated constant; the film humidity information calculation formula is as follows: W = K1 * delta Q + K3 * delta + C1, W represents the water content, K1 and K3, C1 represents the calibrated constant, delta represents the frequency offset, and delta Q represents the consumption offset; the method has the advantages that 1, compared with a traditional system for measuring the humidity and the thickness of thefilm, the method is more environment-friendly; 2, the humidity and the thickness of the film can be measured at the same time; and 3, compared with a method for measuring and calculating the humidityand the thickness of the film by utilizing sweep frequency, the cost is lower and the measurement speed is high. And 4, the method has good test sensitivity, stability, reliability, maintainability,environmental adaptability and relatively high anti-interference capability, and can meet the requirements of industrial production.

Description

technical field [0001] The invention specifically relates to a method for online detection of film thickness and humidity based on frequency deviation and consumption deviation. Background technique [0002] The traditional method of measuring the thickness and humidity of the film is mainly carried out with the method of radioactive sources, but as the country attaches great importance to environmental protection and safety, this method can no longer meet people's needs. At the same time, there is no device that can measure the humidity and thickness of the film at the same time in industrial production. At present, the principle of sweeping frequency can be used to measure the humidity and thickness of the film at the same time in the laboratory environment, but this method takes a long time and is not suitable for online production. , so there is an urgent need for a paper thickness humidity detection method to solve this problem. Contents of the invention [0003] The...

AI Technical Summary

Problems solved by technology

[0002] The traditional method of measuring the thickness and humidity of the film is mainly carried out by radioactive sources, but with the country's emphasis on environmental protection and safety, this method can no longer meet people's needs

At the same time, there is no device that can measure the humidity and thickness of the film at the same time in industrial production. At present, the principle of sweeping frequency can be used to measure the humidity and thickness of the film at the same time in the laboratory environment, but this method takes a long time and is not suitable for online production. , so there is an urgent need for a paper thickness humidity detection method to solve this problem