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Method for detecting residual stress of fiber-texture film

A technology of residual stress and detection method, which is applied in the direction of measuring force, measuring device, instrument, etc., can solve the problem of inaccurate residual stress test of silk textured film, and achieve the effect of solving inaccuracy

Active Publication Date: 2020-09-15
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The purpose of the present invention is to solve the problem of inaccurate testing of the residual stress of the silk textured film by using the traditional method, and propose a method for detecting the residual stress of the silk textured film

Method used

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  • Method for detecting residual stress of fiber-texture film
  • Method for detecting residual stress of fiber-texture film
  • Method for detecting residual stress of fiber-texture film

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specific Embodiment approach 1

[0018] Specific implementation mode 1. Combination figure 1 , Figure 2a and Figure 2b This embodiment will be described. A method for detecting residual stress of a silk-textured thin film described in this embodiment, the method specifically includes the following steps:

[0019] Step 1. Establish a sample coordinate system S, a crystal physical coordinate system C and a test coordinate system L. The sample coordinate system S, the crystal physical coordinate system C and the test coordinate system L are all three-dimensional Cartesian coordinate systems, and the sample coordinate system S, the crystal physical coordinate system C and the test coordinate system L are concentric;

[0020] The three coordinate axes of the sample coordinate system S, the crystal physical coordinate system C and the test coordinate system L all satisfy the right-hand rule;

[0021] Step 2, transforming the flexibility tensor of the sample in the crystal physical coordinate system C to the s...

specific Embodiment approach 2

[0027] Specific embodiment two: the difference between this embodiment and specific embodiment one is that the S of the sample coordinate system S 3 The axis is perpendicular to the plane where the film surface lies, S 1 Axis and S 2 The axis is located in the plane of the film surface; the crystal physical coordinate system C is determined by the crystal structure and is completely fixed; the sample coordinate system S revolves around its own S 1 The axis is rotated by ψ angle to obtain the test coordinate system L, and the L of the test coordinate system L 3 The axis is parallel to the diffraction vector direction of the diffraction crystal plane;

[0028] Introduce the intermediate coordinate system L', taking the cubic crystal system as an example, the L' of the intermediate coordinate system L' 3 The axis is parallel to the (h, k, l,) vector in the crystal physical coordinate system C, L′ 1 axis and L' 2 The axes are respectively related to (l 2 +k 2 ,–kh,–lh) and ...

specific Embodiment approach 3

[0030] Specific embodiment 3: The difference between this embodiment and specific embodiment 2 is that in the first step, the transformation matrix a of the conversion from the sample coordinate system S to the intermediate coordinate system L' L′S for:

[0031]

[0032] Transformation matrix a for transforming crystal physical coordinate system C to intermediate coordinate system L' L′C for:

[0033]

[0034] Transformation matrix a for transforming crystal physical coordinate system C to sample coordinate system S SC for:

[0035]

[0036] Among them, (a L′S ) -1 for a L′S the inverse matrix of l 1 , l2 , l 3 、m 1 、m 2 、m 3 , n 1 , n 2 , n 3 Both are a SC Tensor elements in .

[0037] A superscript C, S, L' or L in a tensor or tensor element refers to the corresponding coordinate system in which the tensor or tensor element is located, respectively.

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Abstract

The invention discloses a method for detecting residual stress of a fiber-texture film, and belongs to the technical field of characteristic characterization of film materials. According to the invention, the problem of inaccurate testing of the residual stress of the fiber-texture film by adopting a traditional method is solved. Based on the transverse isotropy of the fiber-texture film, a specific solution is provided for residual stress analysis of the fiber-texture film; and through coordinate system conversion, elastic tensor of a sample under a sample coordinate system is directly calculated, so that the relationship between macroscopic residual stress and strain under the sample coordinate system can be established according to the generalized Hooke law. By adopting the theoreticalmodel of the relationship between the residual stress and the strain established by the invention, the problem that the residual stress of the fiber-texture film is not accurately tested by the traditional X-ray diffraction stress testing method can be effectively solved; and the method can be applied to detection of the residual stress of the fiber-texture film.

Description

technical field [0001] The invention belongs to the technical field of characteristic characterization of thin film materials, and in particular relates to a non-destructive detection method for characterizing the residual stress of a thin film with silk texture. Background technique [0002] Thin film materials play an important role in various fields of modern material science and technology. Especially in the field of microelectronics and solid-state electronic technology, the development trend of miniaturization and integration of devices is unstoppable, which leads to the emergence and rapid development of thin film materials. Thin film technology is one of the most effective means to realize the miniaturization of devices and systems. However, in today's film preparation process, residual stress will inevitably be generated, and the existence of residual stress will directly affect the performance of the film. Generally speaking, tensile stress will cause film crackin...

Claims

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Application Information

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IPC IPC(8): G01L1/25G01N23/20
CPCG01L1/25G01N23/20
Inventor 盛捷王召赵瑜李伟力刘超前费维栋
Owner HARBIN INST OF TECH
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