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Nonlinear self-correcting resonance type surface acoustic wave temperature sensor

A temperature sensor and surface acoustic wave technology, which is applied in the field of sensor design, can solve the problems of increasing the volume of the sensor, increasing the number of resonators, and high requirements for the consistency of the preparation process, and achieves the effects of easy control of the processing technology, small overall size, and flexible design.

Active Publication Date: 2020-09-11
BEIJING RES INST OF TELEMETRY +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, this method increases the number of resonators, requires high consistency of the fabrication process, and inevitably increases the volume of the sensor

Method used

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  • Nonlinear self-correcting resonance type surface acoustic wave temperature sensor
  • Nonlinear self-correcting resonance type surface acoustic wave temperature sensor
  • Nonlinear self-correcting resonance type surface acoustic wave temperature sensor

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Experimental program
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Effect test

Embodiment

[0046] The substrate is made of AT quartz (Euler angle (0°, -54.7°, θ)) piezoelectric sheet, the surface acoustic wave has a natural unidirectionality in the phase velocity propagation direction angle θ (θ = 20°), and the energy flow angle 4°<PFA<6°.

[0047] The interdigital transducer, the first metal reflection grid array and the second metal reflection grid array use metal Al electrodes, the metallization ratio is equal, and the metallization ratio is 0.25. In the interdigital transducer, the first metal reflection grid array and the second metal reflection grid array A groove is designed for the gap between the metal fingers of the two-metal reflective grid array, and the depth of the groove is 1 / 2 of the thickness of the metal finger.

[0048] The interdigital transducers are weighted, and the weighting function is a cosine function.

[0049] Gap 5 and Gap 6 are equal, which is 0.25 times of the electrical cycle of the IDT.

[0050] The synchronization frequency of the...

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Abstract

The invention discloses a nonlinear self-correcting resonance type surface acoustic wave temperature sensor, which comprises a substrate, an interdigital transducer, a first metal reflecting grating array and a second metal reflecting grating array. The acoustic surface wave on the substrate has natural unidirectivity in a phase velocity propagation direction, an energy flow angle PFA exists in agroup velocity propagation direction and the phase velocity propagation direction, and the absolute value of PFA is smaller than or equal to 10 degrees; and the acoustic aperture directions of the interdigital transducer, the first metal reflecting grating array and the second metal reflecting grating array are perpendicular to the phase velocity propagation direction, and the bus bar direction ofthe interdigital transducer is parallel to the energy flow angle PFA direction. The resonance type surface acoustic wave temperature sensor based on the design has a low-frequency resonance peak anda high-frequency resonance peak. According to the invention, low-frequency and high-frequency characteristic resonance peaks are utilized; through a self-difference method, nonlinear self-correction of the sensor is achieved, and the small size of a single device is kept; meanwhile, a problem that when a single resonance peak of an existing single resonator is used, frequency signal demodulation is affected by a wireless path is solved, and calibration avoidance of the sensor in the using process is achieved.

Description

technical field [0001] The invention relates to a nonlinear self-correcting resonant surface acoustic wave temperature sensor, which belongs to the field of sensor design. Background technique [0002] The wireless passive resonant surface acoustic wave temperature sensor is a passive sensor developed by means of a wireless reading system and a surface acoustic wave resonator. This sensor has its unique advantage that it does not require any energy supply, and can be absolutely passive, which solves the problem of power consumption of active sensors; in addition, due to wireless sensing, it can be applied to harsh environments such as high voltage, highly toxic, and rotating , no need for signal transmission cables, which solves the application scene measurement that cannot be realized by traditional temperature sensors. [0003] The resonant surface acoustic wave temperature sensor is prepared by depositing metal interdigitated electrodes on the surface of the piezoelectri...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01K11/26
CPCG01K11/265
Inventor 郝文昌骆伟赵广宏焦海龙刘铁钢张小辉
Owner BEIJING RES INST OF TELEMETRY
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