Defect inspection device and method

Abstract

The invention provides a defect inspection device and method. The method comprises the following steps: measuring position information of an inspected object by adopting a position measurement module;according to the position information, when the inspected object moves one pixel of the camera module, generating a certain time pulse, correcting the timing pulse error, and delaying the timing pulse by one clock and then outputting the timing pulse; imaging the surface of the object to be inspected on the basis of the timing pulse delayed by one clock, and outputting an image signal; and inspecting the defects of the inspected object according to the image signal. Therefore, according to the present invention, by improving the accuracy of a timing pulse, the image resolution is improved, and an accurate trigger pulse can be generated even when slow output rate position information is used.

Description

technical field [0001] The present invention relates to the field of human technology, and more particularly, relates to a defect inspection device and method. Background technique [0002] In semiconductor defect inspection systems, laser interferometers are usually used to detect the position of the carrier platform on which the wafer (inspected object) is mounted. A fixed amount of displacement of the object generates a trigger pulse (also called a "timing pulse"). [0003] see figure 1 , figure 1 Shown is a Japanese patent (Japanese Laid-Open No. 2003-177101) relating to a defect inspection device for detecting defects in wafer patterns. This device is a device for detecting the position and image of a defect on a wafer surface. as the picture shows, figure 1 There is a timing pulse generation module shown in label 29. The timing pulse generation module generates a timing pulse according to the relationship between the output data of the laser interferometer and th...

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Problems solved by technology

[0004] However, when the above method is used to generate the timing pulse, there will be an error in the data output interval of the position measurement circuit. Even if the fastest position measurement circuit is selected, the error may not be sufficient to meet the system requirements; The round carrier platform moves at an increased speed, and timing pulses cannot be generated with sufficient precision in the output interval of the normal laser interferometer

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