Novel piezoelectric rotation precision driving platform based on parasitic inertia principle

Abstract

The invention relates to a piezoelectric rotation precision driving platform based on a parasitic inertia principle. The piezoelectric rotation precision driving platform is composed of a piezoelectric stack, an asymmetric thin-wall type flexible hinge mechanism, a rotor, a pre-tightening screw, a pre-tightening wedge block and a base. The piezoelectric stack can be extended and recovered under the driving of voltage signals, and the asymmetric thin-wall type flexible hinge mechanism can realize parasitic inertial motion; the pre-tightening screw is used for adjusting the initial pre-tightening force between the asymmetric thin-wall type flexible hinge mechanism and the rotor; and the base supports, installs and fixes other parts. The main output direction of the piezoelectric stack and the rotation center of the rotor are on the same straight line, and the rigidity of the piezoelectric stack in the main output direction is fully utilized; and the asymmetric thin-wall type flexible hinge mechanism is good in rigidity and capable of bearing large loads, and the output loads of the driving platform are increased. The output load of the driving platform is improved. The platform can achieve rotary stepping motion in a certain direction and can be applied to the technical fields of precision and ultra-precision machining, micro electro mechanical systems, micro-operation robots, large-scale integrated circuit manufacturing and biology.

Description

technical field [0001] The invention relates to the fields of precision ultra-precision machining, micro-nano manipulating robots, and micro-electromechanical system engineering, and in particular to a novel piezoelectric rotary precision drive platform based on the principle of parasitic inertia. Background technique [0002] Precision drive technology with micro / nano-level positioning accuracy is a key technology in high-tech fields such as ultra-precision machining and measurement, optical engineering, modern medical care, and aerospace technology. In order to achieve micro / nano-level output accuracy, the application of modern precision drive technology puts forward higher requirements for the accuracy of the drive device. The traditional driving device has low output accuracy and large overall size, which cannot meet the requirements of micro / nano-level high precision and small size of the driving device in the precision system of modern advanced technology. Piezoelectr...

AI Technical Summary

Problems solved by technology

However, piezoelectric elements, such as piezoelectric stacks, usually use the d33 working mode, which has a small stiffness in the section perpendicular to the main output direction, and the resulting preload is small, resulting in the overall device The output load is greatly reduced, and the large stiffness of the piezoelectric element in the main output direction is not fully utilized

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