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High-precision measurement method of tooth pitch deviation and tooth profile deviation of tiny gears based on white light interferometer

A technology of white light interferometer and measurement method, which is applied in the direction of measuring devices, instruments, and optical devices, etc. It can solve the problem that the size of micro gears is small, visual measurement cannot meet the precision requirements of micro gears, and the spot diameter of laser displacement sensor cannot meet the measurement of micro gears. Requirements and other issues to achieve the effect of improving centering accuracy and ensuring extraction accuracy

Active Publication Date: 2020-11-20
BEIJING UNIV OF TECH
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Problems solved by technology

The main reason is that the size of the micro-gear is so small that the spot diameter of the laser displacement sensor cannot meet the measurement requirements of the micro-gear, and the visual measurement cannot meet the precision requirements of the micro-gear, and the conventional contact measurement and comprehensive measurement methods are helpless.

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  • High-precision measurement method of tooth pitch deviation and tooth profile deviation of tiny gears based on white light interferometer
  • High-precision measurement method of tooth pitch deviation and tooth profile deviation of tiny gears based on white light interferometer
  • High-precision measurement method of tooth pitch deviation and tooth profile deviation of tiny gears based on white light interferometer

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[0040] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. However, it should not be understood that the scope of the above subject matter of the present invention is limited to the following implementation manners, and all technologies realized based on the contents of the present invention belong to the scope of the present invention.

[0041]The measurement equipment used in the present invention is Taylor Hobson's CCI MP series white light interferometer, the measurement software is TalysurfCCI, and the analysis software is TalyMap Gold V7. The resolution of the white light interferometer in the Z-axis direction can reach 0.01nm, and it is a high-precision measurement device widely used in three-dimensional surface topography measurement. The parameters of the tested tiny gears are: number of teeth 7, modulus 0.08, pressure angle 20°, coefficient of variation +0.3.

[0042] The high-precis...

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Abstract

The invention discloses a micro gear pitch deviation and tooth profile deviation high-precision measurement method based on a white light interferometer, and the method does not need to independentlydesign an image collection system, and does not need to additionally use an image processing technology. The inclination degree of the end face of the micro gear is directly monitored in real time according to the appearance sequence of interference patterns, and the extraction precision of the gear contour is ensured; the gear center is determined based on the gear end face three-dimensional point cloud data, and the gear centering precision is effectively improved.

Description

technical field [0001] The invention relates to a high-precision measuring method for tooth pitch deviation and tooth profile deviation of tiny gears based on a white light interferometer, and belongs to the technical fields of precision testing technology, instrument and gear detection. Background technique [0002] Gears and gear products are widely used in various types of mechanical equipment to transmit power between different components of the system. People usually refer to gears with a modulus of less than 1mm as small modulus gears, and gears with a modulus of less than 0.1mm are usually called micro gears. With the development of the manufacturing industry, micro gears, as important transmission parts in micro transmission systems, play an irreplaceable role in the fields of biomedicine, aerospace and precision instruments, meters, information science and military. [0003] In the traditional micro-gear processing methods, such as LIGA technology (Lithographie Gal...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/14G01B11/24
CPCG01B11/14G01B11/2416
Inventor 石照耀宋辉旭于渤
Owner BEIJING UNIV OF TECH
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