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Ultrahigh-precision plane air floatation work piece table

A workpiece table and air flotation technology, which is applied in the manufacture of electrical components, conveyor objects, semiconductor/solid-state devices, etc., can solve problems such as large errors, low positioning accuracy, and jamming, so as to eliminate friction, improve efficiency, and ensure The effect of stability

Active Publication Date: 2020-01-24
无锡地心科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] At present, the air-floating workpiece table can realize fast operation and precise positioning, and is widely used in the semiconductor production industry. However, during the movement of the workpiece table, the gap between the air-floating track and the slider is prone to jamming due to the small gap. low precision, large error

Method used

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  • Ultrahigh-precision plane air floatation work piece table
  • Ultrahigh-precision plane air floatation work piece table
  • Ultrahigh-precision plane air floatation work piece table

Examples

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Embodiment

[0030] Such as figure 1 , figure 2 As shown, an ultra-high-precision planar air-floating workpiece table includes a platform 1, and the platform 1 adopts a marble platform, which is polished by hand to improve precision. Two guide rails 2 are arranged on the upper side of the platform 1, and the two guide rails 2 are respectively located on the left and right sides of the platform 1, and are arranged parallel to each other. A vertical motor 3 is fixed on the outside of each guide rail 2, and the vertical motor 3 adopts a direct drive motor. Each guide rail 2 is slidably provided with a vertical air bearing slider 5 , and the vertical air bearing slider 5 is connected to the vertical motor 3 . Further, the vertical motor 3 includes a first stator 301 and a first mover 302 that cooperate with each other. The first stator 301 is fixed on the surface of the platform 1 and is parallel to the guide rail 2. The upper end of the first mover 302 is fixed with a motor The mounting pl...

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Abstract

The invention discloses an ultrahigh-precision plane air floatation work piece table, which comprises a platform. Two guide rails are arranged on the upper side face of the platform. A vertical motoris fixed to the outer side of each guide rail, a vertical air floatation slider is arranged on each guide rail in a sliding mode, and the vertical air floatation sliders are connected with the vertical motors. A cross beam is fixedly arranged between the two vertical air floatation sliders, and the cross beam is of an upright U-shaped structure. A transverse motor is arranged in a U-shaped grooveof the cross beam. A work piece table assembly is further arranged on the cross beam in a sliding mode. Because gaps with different sizes are formed between the two vertical guide rails and the vertical air floatation sliders, the jamming phenomenon is avoided. Magnetic pre-loading is achieved through magnetic strips and steel strips and corresponds to the air floatation force at the vertical airfloatation sliders, so that the stability of the air floatation slider is maintained, and there is no friction. Moreover, double-shaft driving is adopted, and the working accuracy and efficiency are improved.

Description

technical field [0001] The invention relates to semiconductor production equipment, in particular to an ultra-high-precision plane air-floating workpiece table. Background technique [0002] At present, the air-floating workpiece table can realize fast operation and precise positioning, and is widely used in the semiconductor production industry. However, during the movement of the workpiece table, the gap between the air-floating track and the slider is prone to jamming due to the small gap. The accuracy is low and the error is large. Contents of the invention [0003] In order to solve the defects of the above-mentioned prior art, the present invention provides an ultra-high-precision planar air-floating workpiece table. The present invention avoids gaps of different sizes between two vertical guide rails and the vertical air-floating sliders. Stuck phenomenon, magnetic preload is realized through magnetic strips and steel strips, corresponding to the air buoyancy force...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/687H01L21/677
CPCH01L21/67784H01L21/68764H01L21/68785
Inventor 许云飞
Owner 无锡地心科技有限公司
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