Differential type optical addressing potential sensor
A potential sensor and sensor technology, applied in the field of biochemical sensors, can solve the problems of complicated replacement and debugging operations, cumbersome measurement steps, and measurement results are easily affected by external factors, and achieve the effect of convenient replacement, easy replacement, and improved accuracy.
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[0018] Refer to the following examples figure 2 , image 3 and Figure 4 .
[0019] Differential optical addressable potential sensor, including measurement sub-sensor 27, reference sub-sensor 28, measurement reference electrode 34, reference end laser 35, measurement end laser 36, current-voltage conversion circuit 37, integrator 38, phase-sensitive rectification circuit 39, adding circuit 46, subtracting circuit 47, solution pool 40.
[0020] The reference sub-sensor 27 is a semiconductor substrate in the shape of a square card. The thickness of the reference sub-sensor 27 is between 100-400um. The reference sub-sensor uses silicon nitride sensitive to hydrogen ions as the sensitive layer 19 , silicon dioxide as the transition layer 20 , and silicon as the semiconductor layer 21 . The cross-sectional structure of the reference sub-sensor is a metal electrode 18 - a sensitive layer 19 - a transition layer 20 - a semiconductor layer 21 - an output electrode 22 . The man...
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