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A system and method for improving temperature stability of silicon microgyroscope scale factor

A scale factor, silicon micro-gyroscope technology, used in instruments, measuring devices, steering sensing equipment and other directions, can solve problems such as increasing processing difficulty and cost, interfering with gyroscope signal detection accuracy, limiting working bandwidth, etc., to reduce processing difficulty. and manufacturing cost, the effect of improving accuracy and stability, and improving temperature stability

Active Publication Date: 2021-03-26
SOUTHEAST UNIV
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Problems solved by technology

Existing scale factor temperature compensation methods mainly include algorithm compensation, virtual Coriolis force compensation, and micro-mechanical platform compensation. The additional modal vibration introduced will interfere with the detection accuracy of the gyroscope signal and limit the working bandwidth; the compensation of the micro-mechanical platform requires additional design and processing of the movable micro-platform, which increases the processing difficulty and cost

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  • A system and method for improving temperature stability of silicon microgyroscope scale factor

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Embodiment Construction

[0030] The technical scheme of the present invention will be further introduced below in conjunction with the accompanying drawings.

[0031] Such as figure 1 , the system for improving the temperature stability of the silicon micro-gyroscope scale factor of the present invention includes: a gyroscope drive closed-loop loop 100 , a gyroscope detection closed-loop loop 200 , and a gyroscope scale factor temperature compensation module 300 .

[0032]Wherein, the gyroscope driving closed-loop loop 100 includes a driving mode detection electrode 101, a driving mode driving electrode 102, a driving mode C / V conversion circuit 103, a driving mode amplification circuit 104, a driving mode A / D conversion circuit 105, Driving mode D / A conversion circuit 106, phase demodulation module 107, amplitude demodulation module 108, phase locked loop 109, automatic gain controller 110, direct digital frequency synthesizer 111 and the first multiplier. Drive Mode The drive electrode 102 is confi...

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Abstract

The invention discloses a system and a method for improving temperature stability of a scale factor of a silicon micro gyroscope. The system comprises a driving closed loop, a detection closed loop and a scale factor temperature compensation module; the driving closed loop produces driving mode resonant frequency omegax of the silicon micro gyroscope and a sine signal sinomegaxt of the omegax, andthe omegax and the sinomegaxt are respectively output to a scale factor temperature compensation module and the detection closed loop; the detection closed loop produces an angular velocity signal without scale factor temperature compensation, and the angular velocity signal is input into the scale factor temperature compensation module; the scale factor temperature compensation module performs scale factor temperature compensation on the angular velocity signal without scale factor temperature compensation based on omegax, and produces a compensated angular velocity output signal; and the compensated angular velocity output signal has no connection with the omegax. Through the system and method disclosed by the invention, the scale factor temperature compensation is realized based on a gyroscope force feedback closed-loop detection mode, and the temperature stability of the scale factor of the gyroscope can be improved.

Description

technical field [0001] The invention relates to the field of silicon micro gyroscopes, in particular to a system and method for improving the temperature stability of the silicon micro gyroscope scale factor. Background technique [0002] As a sensor sensitive to input angular velocity using Coriolis effect, silicon micro gyroscope is one of the important applications of MEMS technology in the field of inertial navigation. It has the advantages of small size, light weight, low cost, mass production, and easy integration. Both military and civilian fields have been widely used. [0003] The silicon micro gyroscope has two working modes: driving mode and detection mode. The driving mode tracks the resonant frequency of the driving mode in real time and maintains a constant amplitude in the driving direction; the detection mode detects the vibration caused by the input angular velocity of the sensitive shaft in real time Modal vibration, so as to obtain the magnitude of the in...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01C19/56G01C25/00
CPCG01C19/56G01C25/005
Inventor 李宏生贾佳丁徐锴丁柏会刘学文李文凯
Owner SOUTHEAST UNIV
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