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Variable-aperture crucible and OLED film forming system

A crucible and aperture technology, which is applied in the field of variable aperture crucibles and OLED film forming systems, can solve the problems of complex operation, compatibility of parts, and too many types of parts, so as to improve production efficiency, reduce parts, and reduce The effect of spare parts cost

Pending Publication Date: 2019-12-10
东莞市能特自动化科技有限公司
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  • Abstract
  • Description
  • Claims
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Problems solved by technology

[0004] But at the same time, there are too many types of parts, complicated operation and compatibility problems between parts.

Method used

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  • Variable-aperture crucible and OLED film forming system
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  • Variable-aperture crucible and OLED film forming system

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Embodiment Construction

[0024] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments It is a part of embodiments of the present invention, but not all embodiments. The components of the embodiments of the invention generally described and illustrated in the figures herein may be arranged and designed in a variety of different configurations.

[0025] Accordingly, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely represents selected embodiments of the invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art wi...

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Abstract

The embodiment of the invention provides a variable-aperture crucible and an OLED film forming system, and relates to the technical field of display. The variable-aperture crucible comprises a crucible body, a dispersion plate set and a moving assembly; the crucible body is provided with a containing cavity and an evaporation hole communicating with the containing cavity, the dispersion plate setis movably arranged on the crucible body and is used for covering the evaporation hole, the moving assembly is in transmission connection with the dispersion plate set, and is used for driving the dispersion plate set to move, and the area, sheltered by the dispersion plate set, of the evaporation hole can be adjusted. The variable-aperture crucible and the OLED film forming system have the advantages of being simple in structure and convenient to use and can be suitable for different film forming material film forming thicknesses and film forming speeds, and the evaporation rate stability anduniformity are balanced.

Description

technical field [0001] The invention relates to the field of display technology, in particular to a variable aperture crucible and an OLED film forming system. Background technique [0002] OLED has the advantages of ultra-thin, high responsiveness, high contrast, and low power consumption. In the OLED film forming system, evaporation technology is the mainstream technology in the industry at present. In the existing OLED point source crucible evaporation system, the existing OLED heating methods are: 1. Heat conduction resistance heating: heat is transferred from the outside to the inside , Uniform heating; slow temperature rise and fall, using metal and non-metal materials. 2. Alternating frequency eddy current heating: heating from the inside to the outside, the heating speed is fast, the heating is relatively uniform, and it is suitable for heating metal materials. 3. Radiation heating: uniform heating, no material restrictions, etc. [0003] From the perspective of O...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/24H01L51/56
CPCC23C14/243H10K71/00
Inventor 张冲森
Owner 东莞市能特自动化科技有限公司
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