A system and method for preparing solid-state nanohole arrays with automatic precise positioning

Abstract

The invention discloses a system and method for automatically and accurately positioning and preparing a solid-state nanohole array. The entire process of the system for automatically and accurately positioning and preparing a solid-state nanohole array is controlled by an automation system to realize automatic preparation of solid-state nanopores. Solid-state nanopores Array preparation, and then realize solid-state nanopore-related detection applications. The nanopore reaming program adopts PID and other control algorithms to control the changes of the reaming voltage and reaming time, which improves the drilling efficiency and aperture precision; the entire nanopore preparation process adopts an in-situ online method, which is seamless with the later nanopore test Link.

Description

technical field [0001] The invention belongs to the technical field of nanohole processing, and in particular relates to a system and method for automatically and accurately positioning and preparing a solid-state nanohole array. Background technique [0002] With the development of nanoscience and technology, nanopore single-molecule technology has become one of the most powerful tools for applied research in the field of life sciences. Solid-state nanopores have been used by many researchers in DNA sequencing, RNA sequencing, and protein structure testing experiments due to their stable performance and controllable pore size. Most of their preparation materials are two-dimensional thin film materials. The existing solid-state nanopore processing methods mainly include transmission electron microscopy processing, focused ion beam processing, and electrical breakdown processing methods. The former two are due to expensive equipment and harsh laboratory conditions, and the pr...

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Problems solved by technology

Among them, the constant voltage source breakdown method has the advantage of fast breakdown speed, but due to the need to preset the breakdown current value, the problems of preparing false nanopores and breaking nanofilms will gradually be eliminated; voltage pulse breakdown method and current pulse breakdown method The method is the current mainstream drilling method, which has the advantages of controllable nanopore diameter and pore shape, but because of its nanopore diameter test and electric pulse interspersed execution, it leads to the shortcomings of inaccurate pore size test and time-consuming preparation; The current breakdown method of the tube and the Z-Score constant voltage source breakdown method are new nanopore preparation methods proposed by the research group recently. The former has the advantage of controllable nanopore position, and the latter has the advantage of controllable nanopore diameter. , but based on the current breakdown method of glass microtubes, the method of using close capacitance to control displacement requires additional equipment and cumbersome procedures such as calculation of off-line capacitance, which is not conducive to the widespread use of this equipment; based on Z-Score constant voltage source shock The piercing method solves the problems of the preset breakdown current value and the existing problems of punching false holes and breaking the film in the constant voltage source electric breakdown method, and can control the drilling accuracy of nanopores within 0.5nm, but it still Researchers are required to explore the parameters of the drilling voltage, and because the duration of the drilling voltage and the drilling voltage are fixed, the drilling accuracy and drilling time are seriously affected

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