High-accuracy Z-direction single-freedom-degree micro-positioning platform based on multi-stage helical structure hinge

A technology of micro-positioning platform and helical structure, applied in the parts and instruments of instruments, can solve the problems of lack of high precision, large coupling error, restricting the promotion of micro-nano technology, and achieve compact structure, small coupling error, and motion accuracy. high effect

Inactive Publication Date: 2019-11-05
TIANJIN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the high-precision micro-positioning platform has always restricted the promotion of micro-nano technology
The coupling error of the existing Z-direction single-degree-of-freedom micro-positioning platform is relatively large, and there is a lack of high-precision Z-direction single-degree-of-freedom micro-positioning platform with small coupling error

Method used

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  • High-accuracy Z-direction single-freedom-degree micro-positioning platform based on multi-stage helical structure hinge
  • High-accuracy Z-direction single-freedom-degree micro-positioning platform based on multi-stage helical structure hinge
  • High-accuracy Z-direction single-freedom-degree micro-positioning platform based on multi-stage helical structure hinge

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Embodiment Construction

[0031] In order to further understand the invention content, characteristics and effects of the present invention, the following examples are given, and detailed descriptions are as follows in conjunction with the accompanying drawings:

[0032] as attached Figure 1 to Figure 7b As shown, a high-precision Z-direction single-degree-of-freedom micro-positioning platform based on a multi-stage helical structure hinge includes a multi-stage helical structure hinge support ring 1 , a base 2 , a spacer 3 and a piezoelectric ceramic driver 4 .

[0033] The multi-stage helical structure hinge support ring 1 includes an outer ring 15 with a thicker periphery, a thicker terminal platform 14 in the middle, and a thinner multi-stage helical structure between the outer ring 15 and the terminal platform 14 Hinge. The center of the bottom of the terminal platform 14 is in contact with the top of the piezoelectric ceramic driver 4 . The outer ring 15 is provided with six through holes unif...

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Abstract

The invention discloses a high-accuracy Z-direction single-freedom-degree micro-positioning platform based on a multi-stage helical structure hinge. The platform comprises a multi-stage helical structure hinge supporting ring, a base and a piezoelectric ceramic actuator. The multi-stage helical structure hinge supporting ring comprises an outer ring located at the periphery, a terminal platform located in the center, and a multi-stage helical structure hinge located between the outer ring and the terminal platform. The outer ring is fixedly connected to the base. The piezoelectric ceramic actuator is fixedly connected to the interior of the base. The center of the bottom of the terminal platform makes contact with the top end of the piezoelectric ceramic actuator. The piezoelectric ceramicactuator generates Z-direction displacement to drive the terminal platform to generate Z-direction displacement. By adopting the multi-stage helical structure hinge comprising the helical hinge and the round rings in a multi-stage stacking manner, the high-accuracy Z-direction single-freedom-degree micro-positioning platform based on the multi-stage helical structure hinge has the characteristicsof being high in motion accuracy, small in coupling error and compact in structure, and it is be achieved that the terminal platform can move and be located with high accuracy in the Z direction.

Description

technical field [0001] The invention relates to a micro-positioning platform, in particular to a high-precision Z-direction single-degree-of-freedom micro-positioning platform based on a multi-stage spiral structure hinge. Background technique [0002] With the development of science and technology, micro-nano technology has been widely used. However, the high-precision micro-positioning platform has always restricted the promotion of micro-nano technology. The existing Z-direction single-degree-of-freedom micro-positioning platform has relatively large coupling error, and there is a lack of high-precision Z-direction single-degree-of-freedom micro-positioning platform with small coupling error. Contents of the invention [0003] The purpose of the present invention is to overcome the deficiencies in the prior art and provide a high-precision Z-direction single-degree-of-freedom micro-positioning platform based on a multi-stage spiral structure hinge. The error is extrem...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G12B5/00
CPCG12B5/00
Inventor 田延岭杨明旋王福军周重凯李兵臣林文昭王宏运
Owner TIANJIN UNIV
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