Piezoelectric control device and piezoelectric control method for motion accuracy of closed static pressure guide rail

Abstract

The invention discloses a piezoelectric regulating device for the motion precision of a closed static pressure guide rail, which comprises a device fixing bracket fixedly connected to the base of the static pressure guide rail, and a piezoelectric The control component, the piezoelectric control component is composed of a fixed pretension component, a piezoelectric crystal component, and an end connection component from top to bottom. The piezoelectric crystal component is connected to the driver. There is a guide rail slider, the guide rail slider is located on the base of the static pressure guide rail, a sensor bracket is also installed on the base of the static pressure guide rail, and a distance sensor is arranged on the sensor bracket, and the distance sensor monitors the position information of the guide rail slider in real time. The piezoelectric control method of the piezoelectric control device for the motion precision of the closed static pressure guide rail is disclosed, which solves the problem in the prior art that the deformation of the shape and surface of the guide rail affects the linear motion accuracy of the static pressure guide rail during operation.

Description

technical field [0001] The invention belongs to the technical field of precision control devices, and in particular relates to a piezoelectric control device for the motion precision of a closed static pressure guide rail, and also relates to a piezoelectric control method for the piezoelectric control device for the motion precision of a closed static pressure guide rail. Background technique [0002] With the development of the aerospace field, the requirements for the precision of large-aperture (diameter greater than 300mm) optical components are also increasing. Optical components are the main processing objects of precision grinding machines. Generally, the required surface accuracy is 15-30nm and the surface roughness is 0.3-0.6nm. Therefore, higher requirements are placed on the machining accuracy of the grinding machine. Hydrostatic guide rail is one of the important applications of sliding bearings. It has the advantages of low friction coefficient, long life, lar...

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide a piezoelectric control device for the motion accuracy of a closed static pressure guide rail, which solves the problem in the prior art that the deformation of the guide rail shape and surface affects the linear motion accuracy of the static pressure guide rail during operation.

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