Preparation method of self-organized periodic micro-nano structure with glass and crystal alternately arranged

A technology of micro-nano structure and alternate arrangement, applied in the direction of micro-structure technology, micro-structure device, manufacturing micro-structure device, etc. Solve problems such as limited dielectric materials, achieve the effect of improving thermal stability, reducing dispersion, and improving forming accuracy

Active Publication Date: 2022-01-07
ZHEJIANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, most of the periodic micro-nano structures can only be generated on the surface of the material at present. The periodic micro-nano structures inside the transparent medium are of a single type, and the processing efficiency is low. The dielectric materials suitable for preparing internal micro-nano periodic structures are very limited (still quartz Glass-based), it is difficult to adapt to the functionalization, integration and increasing complexity of micro-nano photonic devices

Method used

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  • Preparation method of self-organized periodic micro-nano structure with glass and crystal alternately arranged
  • Preparation method of self-organized periodic micro-nano structure with glass and crystal alternately arranged
  • Preparation method of self-organized periodic micro-nano structure with glass and crystal alternately arranged

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preparation example Construction

[0030] The preparation of the periodic micro-nano structure of the present invention is realized by using an ultrafast laser micro-nano processing manufacturing system. Such as figure 1 As shown, the ultrafast laser micro-nano processing manufacturing system includes a computer, an ultrafast laser, an optical system, a microscopic observation system and a displacement platform. The ultrafast laser is connected to the computer and controlled by the computer to output specific laser pulses; the optical system is coupled with the ultrafast laser to focus the ultrafast laser into the sample; the microscopic observation system is connected to the computer to observe the state of the sample and The processing process; the displacement platform is connected with the computer and controlled by the computer to realize the three-dimensional movement of the sample. Under the control of the computer, the ultrafast laser micro-nano processing and manufacturing system outputs laser pulses ...

Embodiment 1

[0037] Step 1: Prepare sample 11 by suspension method, sample 11 ternary glass 35La 2 o 3 -xTa 2 o 5 -(65-x)Nb 2 o 5 (5

[0038] Adjust Ta by setting 2 o 5 or TiO 2 The mole percentage x of x adjusts the crystallization ability of sample 11. The larger x is, the stronger the crystallization ability of sample 11 is, the easier it is to induce micro-nano structures, and the faster the processing speed used, but the preparation of sample 11 will become more difficult. The specific implementation of the present invention sets Ta 2 o 5 or TiO 2 The mole percentage x can well realize the preparation of periodic micro-nano structures with alternating glass-crystal arrangements.

[0039] Step 2: Fix the sample 11 on the displacement platform 12, find a position suitable for processing through the microscopic observation system, and determine its xyz three-axis coordinates for subsequent setting of motion parameters.

[...

Embodiment 2

[0047] Step 1: Prepare sample 11 by suspension method, sample 11 ternary glass 35La 2 o 3 -xTiO 2 -(65-x)Nb 2 o 5 (30

[0048] Adjust Ta by setting 2 o 5 or TiO 2 The mole percentage x of x adjusts the crystallization ability of sample 11. The larger x is, the stronger the crystallization ability of sample 11 is, the easier it is to induce micro-nano structures, and the faster the processing speed used, but the preparation of sample 11 will become more difficult. The specific implementation of the present invention sets Ta 2 o 5 or TiO 2 The mole percentage x can well realize the preparation of periodic micro-nano structures with alternating glass-crystal arrangements.

[0049] Step 2: Fix the sample 11 on the displacement platform 12, find a position suitable for processing through the microscopic observation system, and determine its xyz three-axis coordinates for subsequent setting of motion parameters.

[005...

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Abstract

The invention discloses a method for preparing a self-organized periodic micro-nano structure in which glass and crystals are alternately arranged. Samples were prepared by suspension method, the sample ternary glass 35La 2 o 3 ‑xTa 2 o 5 ‑(65‑x)Nb 2 o 5 (5<x<45) or 35La 2 o 3 ‑xTiO 2 ‑(65‑x)Nb 2 o 5 (30<x<60), where x represents the mole percentage (mol.%); the sample is fixed on the displacement platform, the ultrafast laser emits an ultrafast laser beam, and the ultrafast laser beam passes through a shutter, a Glan Taylor prism and a half-wave The film is irradiated on the sample and focused into the sample; when the focused sample is excited by the ultrafast laser beam and visible light appears, the displacement platform is started to make the sample move relative to the laser beam according to the set path and motion parameters. At the focal point of , polarization-dependent periodic micro-nanostructures are induced. The invention realizes the high-efficiency preparation of a polarization-dependent periodic micro-nano structure, and expands the functional materials that can be used for forming the periodic micro-nano structure.

Description

technical field [0001] The invention relates to the technical field of ultrafast laser micro-nano processing, in particular to a method for preparing a self-organized periodic micro-nano structure in which glass and crystals are alternately arranged. Background technique [0002] Ultrafast laser micro-nano processing technology is an advanced manufacturing technology that uses laser pulses with extremely small pulse width and high peak energy for precise micro-nano processing. This technology mainly induces a series of physical and chemical reactions through the interaction between strong-field laser and matter. At the same time, it uses the nonlinear absorption of ultrafast pulses by materials to break through the optical diffraction limit, and finally realizes ultra-precision optical micromachining with feature sizes reaching nanoscale. . [0003] Periodic micro-nano structures are widely used in many fields such as optical communication, optical storage, optical regulati...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B81C1/00B23K26/03B23K26/06B23K26/082B23K26/352
CPCB81C1/00031B81C1/00515B23K26/352B23K26/082B23K26/0643B23K26/0652B23K26/032
Inventor 张博孙潇雨谭德志邱建荣
Owner ZHEJIANG UNIV
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