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Method for releasing machine program and system

A technology for releasing machines and programs, applied in electrical components, semiconductor/solid-state device manufacturing, circuits, etc., can solve problems such as reducing production efficiency and accuracy, improve production efficiency, reduce the steps of manually informing engineers, and save manpower. Effect

Active Publication Date: 2019-08-23
ZHENGZHOU UNIV OF IND TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This manual processing method greatly reduces production efficiency and accuracy

Method used

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  • Method for releasing machine program and system
  • Method for releasing machine program and system
  • Method for releasing machine program and system

Examples

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Embodiment Construction

[0027] In order to make the purpose, features and effects of the present invention more obvious and understandable, the specific implementation manners of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0028] Many specific details are set forth in the following description to facilitate a full understanding of the present invention, but the present invention can also be implemented in other ways than described here, so the present invention is not limited by the specific embodiments disclosed below.

[0029] This application firstly provides a method for releasing machine programs, such as figure 1 shown, including:

[0030] In step S10, the process engineer writes all the programs of the test machine, the test items required to release each program, and the one-to-one corresponding arrangement of each program and the test items required to release the program into the MES system.

[0031]In step S11, the process engin...

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Abstract

The invention relates to a method for releasing a machine program and a system. The method comprises the steps that programs and required test items of the machine for processing a control wafer are determined according to the condition of the machine so as to form a process flow of the control wafer; all programs of the machine are arranged corresponding to the test items required for releasing each program; the control wafer executes procedures according to the process flow, a measurement machine measures the processed test items of the control wafer, the measured value of each test item iscompared with a standard value, and the comparison result is recorded; and if all test items corresponding to a program are qualified, the program corresponding to the all qualified test items is released. The release of the program can be controlled more effectively according to the invention.

Description

technical field [0001] The invention relates to the field of semiconductors, in particular to a method and system for releasing machine programs. Background technique [0002] With the development of semiconductor technology, semiconductor companies will use software control systems to maximize the production capacity of semiconductor production equipment. The core of this series of control systems is the Manufacturing Execution System (Manufacturing Execution System, MES) and the EAP system (Equipment Automation Programming, EAP). MES uses a powerful data collection engine and integrated data collection channels to cover the entire factory manufacturing site to ensure real-time, accurate and comprehensive collection of on-site data. MES records all information about machines and chips on the production line. [0003] The EAP system has at least the following functions and features: [0004] 1. Integrate with MES system, automatically verify product production information,...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/67
CPCH01L21/67242H01L21/67276
Inventor 欧阳富
Owner ZHENGZHOU UNIV OF IND TECH
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