Tunable hyperspectral infrared detector and detection function structure, hyperspectral imaging equipment

An infrared detector and functional structure technology, applied in the field of infrared light detection, can solve the problems that thermal infrared band cannot be applied, and can only cover the band range from visible light to short-wave infrared.

Active Publication Date: 2021-06-29
CHONGQING INST OF GREEN & INTELLIGENT TECH CHINESE ACADEMY OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, these techniques cannot be applied in the thermal infrared band
For example, liquid crystal tuning spectroscopy is only applicable to visible light; acousto-optic tuning spectroscopy can only cover the wavelength range from visible light to short-wave infrared (about 0.4-2.5 μm) due to material limitations

Method used

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  • Tunable hyperspectral infrared detector and detection function structure, hyperspectral imaging equipment
  • Tunable hyperspectral infrared detector and detection function structure, hyperspectral imaging equipment
  • Tunable hyperspectral infrared detector and detection function structure, hyperspectral imaging equipment

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Embodiment 1

[0047] see figure 1 , is a schematic structural diagram of an embodiment of a conductive graphene plasmon-based tunable hyperspectral infrared detector of the present invention, specifically, the tunable hyperspectral infrared detector of this embodiment includes a detection function Structure, which includes from top to bottom:

[0048] The electrode layer, specifically, the electrode layer includes a first electrode 201 and a second electrode 202. In a specific embodiment, the first electrode 201 and the second electrode 202 are made of gold with a thickness of 80nm, which can The size of the tuned hyperspectral infrared detector is 100 μm × 100 μm, and the size is 100 μm × 15 μ. Further, in order to enhance the adhesion of the electrode layer, chromium with a thickness of 5 nm is added under the first electrode and the second electrode;

[0049] Graphene layer 203, specifically, the graphene layer adopts double-layer graphene, and each layer of graphene is continuous graph...

Embodiment 2

[0055] The present invention also provides another tunable hyperspectral infrared detector based on conductive graphene plasmons. The tunable hyperspectral infrared detector of this embodiment includes each structure in the above-mentioned embodiment 1, different Yes, the first conductive periodic scatterer and the second conductive periodic scatterer in the tunable hyperspectral infrared detector in this embodiment both use a one-dimensional conductive grating.

[0056] In a specific embodiment, the period of the one-dimensional conductive grating is 80 nm, the thickness is 100 nm, and its material is graphene.

[0057] Of course, the first conductive periodic scatterer can also use a one-dimensional conductive grating, and the second conductive periodic scatterer can use a two-dimensional conductive grating; or the second conductive periodic scatterer can use a one-dimensional conductive grating, and the second conductive periodic The scatterer adopts a one-dimensional condu...

Embodiment 3

[0059] see Figure 4 , is a structural schematic diagram of another embodiment of a conductive graphene plasmon-based tunable hyperspectral infrared detector of the present invention, the tunable hyperspectral infrared detector of this embodiment includes the above-mentioned embodiment 1 or each structure in 2, the difference is that the tunable hyperspectral infrared detector in this embodiment also includes a reflection enhancement structure arranged under the detection function structure, specifically, the reflection enhancement structure includes calcium fluoride A dielectric layer 207 with a thickness of 1.5 um and a reflective layer 208 located under the dielectric layer are produced. Specifically, the reflective layer 208 is made of gold with a thickness of 200 nm.

[0060] Further, in this embodiment, an adhesion layer may also be provided under the reflective layer, specifically, it is made of 5nm chrome.

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Abstract

The invention discloses a tunable hyperspectral infrared detector based on conductive graphene plasmons, which includes a detection function structure, and the detection function structure is an electrode layer, a graphene layer, and a dielectric layer in sequence from top to bottom. And a first conductive periodic scatterer and a second conductive periodic scatterer arranged side by side and insulated from each other. The detector of the present invention not only realizes the integration of "spectral splitting" and "photoelectric detection" to realize the hyperspectral detection of infrared light, but also can greatly reduce the weight and volume of conventional hyperspectral imaging systems, realizing its light weight and small size It can greatly expand the application field of thermal infrared hyperspectral imaging system. Correspondingly, the present invention also provides a detection function structure and a hyperspectral imaging device for a tunable hyperspectral infrared detector.

Description

technical field [0001] The invention relates to the technical field of infrared light detection, in particular to a conductive graphene plasmon-based tunable hyperspectral infrared detector, its detection function structure, and hyperspectral imaging equipment. Background technique [0002] Hyperspectral imaging technology refers to a means to obtain continuous and fine spectral radiation information of a certain number of observation points of the observation object in a wide spectral range. Different elements and their compounds on the earth have their own unique spectral characteristics. Therefore, the spectrum is regarded as a "fingerprint" for identifying substances, and is an important "ID card" for identifying and analyzing the characteristics of different objects. Hyperspectral imaging integrates the geometric, radiation and spectral information of the observed object, and integrates the capabilities of traditional cameras, radiometers and spectrometers. The resolut...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01J3/28G01J3/12
Inventor 汤林龙
Owner CHONGQING INST OF GREEN & INTELLIGENT TECH CHINESE ACADEMY OF SCI
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