Calibration method of detection depth of energy dispersive spectrometer

Abstract

The invention relates to a calibration method of the detection depth of an energy dispersive spectrometer. The calibration method includes the following steps that 1, fused quartz substrates are plated with metal film layers with the thickness of d0 and then are marked as I-type samples; 2, the fused quartz substrates with the metal film layers are plated with SiO2 film layers with different thicknesses respectively and then are marked as II-type samples; 3, the energy dispersive spectrometer is adopted to measure the metal element M proportions of the I-type samples and the II-type samples separately, and the measurement results of the I-type samples are adopted to amend the metal element M proportions of the II-type samples; 4, a curve about the thicknesses of the SiO2 film layers and the metal element proportions after amendment is drawn, and the thickness of the SiO2 film layer when the metal element M proportion is 0 is obtained through fitting and then serves as the detection depth of the energy dispersive spectrometer to complete calibration. Compared with the prior art, the calibration method of the detection depth of the energy dispersive spectrometer has the advantages ofbeing simple and accurate in judgement and the like.

Description

technical field [0001] The invention relates to the field of calibrating the detection depth of an energy spectrometer, in particular to a method for calibrating the detection depth of an energy spectrometer. Background technique [0002] The laser blowing system can transport specific impurities into the tokamak plasma, and the transport behavior of impurities in the plasma can be studied through the transient disturbance and spectral information changes generated by the impurities in the plasma. The amount of impurity implantation is generally kept low and does not significantly affect plasma confinement. Impurities are produced by the laser acting on the metal film on the target surface. After laser-induced damage to the target surface and substrate, impurity particle jetting during the thermal damage process is a form of energy release, and the distribution information of particles in space directly determines the effect of the laser blowing system injecting impurities ...

AI Technical Summary

Problems solved by technology

Due to the penetration depth of the electron beam into the substrate and the ability of the electrons with the characteristic spectral lines of the elements to pass through the bulk material from the substrate and be received by the detector, the two factors together determine that the energy spectrometer can only perform relative measurements, but cannot Quantitatively measure the spatial distribution of elements

Images