A high-precision resonant quartz temperature sensor with multiple arrow-shaped vibrating arms

Abstract

The invention discloses a high-precision resonant mode quartz temperature sensor with a plurality of arrow-shaped vibrating arms. The high-precision resonant mode quartz temperature sensor with the arrow-shaped vibrating arms aims to solve the problems of large volume, fixed thermosensitive quartz resonator, complex mounting structure, slow response speed and the like of an existing temperature sensor. The high-precision resonant mode quartz temperature sensor with the arrow-shaped vibrating arms comprises an integrated packaging part and a thermosensitive quartz resonator, wherein the integrated packaging part is filled with helium gas; the integrated packaging part comprises a pipe cap and a pipe seat; the pipe seat comprises an insulator, a first pin and a second pin; the thermosensitive quartz resonator comprises a base region and n vibrating arms, and n is an even number not less than four. According to the high-precision resonant mode quartz temperature sensor with the arrow-shaped vibrating arms, the mechanical strength of the thermosensitive quartz resonator is improved, a parasitic vibration mode in a conventional structure is reduced, structures are simple to support, fixand mount, high cost rate is achieved, and more importantly the precision, response speed, repeatability and long-term stability of the sensor are improved. The high-precision resonant mode quartz temperature sensor with the arrow-shaped vibrating arms has low working frequency, low power consumption, high precision, high response speed, clean frequency spectrum and high anti-interference capability.

Description

technical field [0001] The invention relates to the field of temperature sensors, in particular to a high-precision resonant quartz temperature sensor with multiple arrow-shaped vibrating arms. Background technique [0002] The resonant quartz temperature sensor is a novel digital sensor, which is famous for its high accuracy, high stability, ultra-high resolution and other excellent characteristics. Its working mechanism is "resonance", not "resistance" generated by molecular thermal motion , so its ultra-low temperature characteristics are also quite good. This is as Russian scholar Maloof pointed out that "the sensitivity of quartz crystal temperature sensors is much higher than that of most existing temperature sensors, including platinum resistance temperature sensors, which are widely used in platinum resistance sensors, and their nonlinearity is large, as high as 0.55°C , while the nonlinearity of the quartz crystal temperature sensor does not exceed 0.07°C.” [000...

AI Technical Summary

Problems solved by technology

[0004] The main advantages of resonant quartz temperature sensors in thickness shear mode are the highest resolution, best accuracy, and best long-term stability, but their main disadvantages are:

[0005] First, the operating frequency is high, usually 10-28MHz, and the distance between the sensitive component and the oscillating circuit should not be greater than 500mm, otherwise the oscillating signal becomes unstable

Therefore, it is not suitable for making a temperature probe with a large insertion depth;

[0006] Second, the response speed is slow, some as long as 60S, and generally more than 10S;

[0007] Third, the power consumption is large, at the mw level;

[0008] Fourth, the support structure of the resonator is complex, so the ability to resist mechanical shock and vibration is not strong;

[0009] Fifth, TO5 type, HC-45 / U, HC-18U, HC-36U package shells are usually used, and the volume is large, so it is not suitable for detecting the temperature field in a small space;

[0010] Sixth, there are many parasitic vibration modes, which vary with the temperature measurement range, requiring complex suppression and compensation techniques

[0012] First, due to its low operating frequency, usually 32-40KHz, its frequency temperature sensitivity is low, usually less than 3.5Hz / ℃;

[0013] Second, the Q value is not very high, usually around 8000, so its temperature resolution is not too high; in order to achieve high resolution, it is necessary to work hard on the algorithm of signal processing

[0014] Third, its repeatability and long-term stability are not comparable to high-frequency thickness-shear mode resonant quartz temperature sensors

This will bring some side effects: the manufacturing width of each electrode and the interval between each connecting electrode become narrow, which not only brings certain difficulties to the processing technology of the electrode, but also reduces the yield, and the quality of the electrode cannot be guaranteed. There are broken wires, short circuits, uneven lines, often pinholes or small island-shaped defects

[0021] Seventh, if the height and width of the base area of ​​the quartz tuning fork are shortened to increase the response speed, the resonance energy of the fork arm of the tuning fork will leak out through the base area and the packaging structure, resulting in an increase in the series equivalent resistance and a decrease in the Q value , the temperature resolution of the sensor becomes worse, the accuracy decreases, and the long-term stability becomes worse

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