Optical imaging system, method, device and storage medium

Abstract

The invention relates to a system, a method, and a device for optical imaging, and a storage medium. The system for optical imaging comprises: a polymer elastic probe array, an optical lens, a camera,and a processing apparatus. The method for optical imaging comprises the following steps: a controlling apparatus controls the polymer elastic probe array to scan the surface of a to-be-tested sampleat a constant height; the optical lens receives optical intensity signals reflected by the compression deformation of the polymer elastic probe array when scanning the surface of the to-be-tested sample, and presents an object image corresponding to the optical intensity signals; the camera collects the optical intensity images corresponding to the object images to the controlling apparatus; andthe controlling apparatus processes the optical intensity images to obtain the surface topography images of the to-be-tested sample. The system, the method, and the device for optical imaging, and thestorage medium solve the technical problems that the conventional optical imaging mirror has low resolution and the atomic force microscopy scanning has low characterization efficiency, and improve the resolution and characterization efficiency of the surface topography images of the to-be-tested sample. The polymer elastic probe array has advantages that preparation costs are low, no damage to the surface of the sample, and the array can be prepared in a large area and can be used repeatedly.

Description

technical field [0001] The invention relates to the field of optical imaging, in particular to an optical imaging system, method, device and storage medium. Background technique [0002] In recent years, the rapid development of nanotechnology has increased the requirements for high-resolution microscopic imaging technology, especially in the field of electronic image applications, which put forward higher requirements for high-resolution images of nanometer size. Traditional optical microscopes are composed of optical lenses, which use changes in the refractive index and curvature of the lenses to magnify the observed object to obtain its detailed information. However, in optical microscopy technology, optical imaging has a diffraction-limited phenomenon, and the diffraction limit of light limits the further improvement of the resolution of optical microscopes, making it difficult for the resolution to break through 200 nanometers. [0003] Traditional technology uses atom...

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Problems solved by technology

[0004] Based on this, it is necessary to provide an optical imaging system, method, device and storage medium for the technical problems of low resolution of optical microscopy, low characterization rate of atomic force microscopy and expensive probes of traditional technology.

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