Method and device for measuring center thickness of post-pupil laser differential confocal lens

A differential confocal and lens center technology, applied in measuring devices, optical devices, instruments, etc., can solve problems such as unsatisfactory high-precision testing of spherical lens center thickness, achieve high-precision calculations, reduce measurement errors, and improve The effect of measurement accuracy

Active Publication Date: 2020-05-12
BEIJING INSTITUTE OF TECHNOLOGYGY
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0014] The purpose of the present invention is to solve the unsatisfactory problem of high-precision measurement of the center thickness of spherical lenses, and to provide a method and device for measuring the center thickness of the rear split pupil laser differential confocal lens. The method collects the measurement beam through the rear pupil, and uses The split-pupil differential confocal detection system is used for detection, thereby realizing precise focusing and high-precision measurement of lens thickness

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  • Method and device for measuring center thickness of post-pupil laser differential confocal lens
  • Method and device for measuring center thickness of post-pupil laser differential confocal lens
  • Method and device for measuring center thickness of post-pupil laser differential confocal lens

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Embodiment 1

[0053] Such as Figure 4 As shown, the post-pupil laser differential confocal lens center thickness measurement device includes a laser 22, an optical fiber 23 and a point light source 1, which are sequentially placed in the beam splitter 2, collimating lens 4 and converging The lens 5 also includes a D-shaped rear pupil 7 placed in the reflection direction of the beam splitter 2 and a split-pupil differential confocal detection system 11 composed of a microscope objective lens 20 and a CCD 21; a main control computer 24 and a motor drive system 25 connected so that it drives the lens under test 6 to scan along the optical axis on the linear guide rail 26 .

[0054] When the device is used to measure the focal length of the lens, the split-pupil differential confocal detection system 11 in the system is used to locate the vertex position of the front surface and the vertex position of the rear surface of the measured lens 6 with high precision, and then measure its central thi...

Embodiment 2

[0067] The measurement steps in this embodiment are the same as in Embodiment 1, as Figure 5 Shown is the center measurement device diagram of the rear split-pupil laser differential confocal lens in this embodiment, Figure 4 The D-shaped rear pupil 7 in is replaced by the circular rear pupil 30 here.

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Abstract

The invention relates to a measurement method and a device for lens center thickness based on a rear spectral pupil laser differential confocal technology, and belongs to the technical field of optical precision measurement. The method performs precise focusing of apexes of the front and back surfaces of a measured lens by using the absolute zero point of the differential confocal response curve,and calculates the center thickness of the measured lens by using ray tracing and a compensation model thereof. According to the invention, the rear spectral pupil laser differential confocal technology is used for high-precision detection of the lens center thickness for the first time, the differential confocal focusing and measurement of lens center thickness can be realized by only one detector, so that the decrease of focusing precision which may be caused by replacing the measured lens is avoided, and the measurement precision is improved; laser differential confocal focusing technologyand ray tracing technology are organically integrated, and the ray tracing and the compensation model thereof are established to eliminate influences between parameters of each focusing surface; and rapid triggering focusing is achieved by linearly fitting the data near the absolute zero point, so that the measurement speed, the precision, and the anti-scatter capability are greatly improved.

Description

technical field [0001] The invention relates to a method and a device for measuring the center thickness of a post-divided pupil laser differential confocal lens, which can be used for non-contact high-precision measurement of the lens center thickness and belongs to the technical field of optical precision measurement. Background technique [0002] In the field of optics, the measurement of lens center thickness is of great significance. Lens center thickness is an important parameter in the optical system, and its processing quality will have a great impact on the imaging quality of the optical system. Especially for lenses in high-performance optical systems such as lithography machine objective lenses and aerospace cameras, it is necessary to precisely adjust the axial gap, radial offset and optical axis deflection angle of the lens according to the curvature radius, refractive index and central thickness of the lens in the lens. adjustment. Taking the objective lens o...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/06
CPCG01B11/06
Inventor 赵维谦杨帅邱丽荣王允
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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