Preparation method of a novel optical fiber f-p cavity sensor device

A sensor device, F-P technology, applied in the direction of instruments, measuring devices, etc., can solve the problems of irregular structure, small size, strong sensor tip structure, etc., and achieve the effect of large temperature range, low cost and high sensitivity

Active Publication Date: 2021-07-27
XI'AN PETROLEUM UNIVERSITY
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  • Claims
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Problems solved by technology

[0006] In order to solve the problem of the existing F-P sensor with high manufacturing cost, irregular optical fiber F-P cavity structure and multi-parameter measurement, the present invention proposes a preparation method of a novel optical fiber F-P cavity sensor device, and conducts temperature, pressure cavity and refractive index measurements. Multi-parameter measurement, the sensor made by this method has a strong structure, small size, simple manufacturing, low cost, and has good measurement accuracy for temperature, pressure and refractive index

Method used

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  • Preparation method of a novel optical fiber f-p cavity sensor device
  • Preparation method of a novel optical fiber f-p cavity sensor device
  • Preparation method of a novel optical fiber f-p cavity sensor device

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Embodiment Construction

[0034] The present invention will be described in further detail below in conjunction with the accompanying drawings.

[0035] The technical scheme of preparing the instrument comprises the following steps:

[0036] 1. Take a section of optical fiber, peel off 5cm of the coating layer to get a section of bare optical fiber, and clean it with alcohol. Cut the bare fiber along the middle with a fiber cutter.

[0037] 2. Fix the optical fiber on the glass slide, place the glass slide on the three-dimensional precision micro-displacement stage, start the excimer laser 9, and adjust the three-dimensional micro-displacement platform 11 so that the laser spot focus position coincides with the end face of the bare optical fiber, and then move along the The optical fiber axially moves the micro-displacement platform outward so that the focus position of the light spot is 500 μm away from the end face of the bare optical fiber.

[0038] 3. Adjust the pulse frequency of the 193nm ArF e...

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Abstract

A preparation method of a novel optical fiber F-P cavity sensor device, comprising the following steps: take a section of optical fiber, peel off the coating layer to obtain a section of bare optical fiber, clean it with alcohol, and cut the bare optical fiber along the middle with an optical fiber cutter; Fix it on a glass slide, place the slide on a three-dimensional precision micro-displacement platform, adjust the three-dimensional micro-displacement platform so that the laser spot focus position coincides with the end face of the bare fiber, and then move the micro-displacement platform outward along the fiber axis to focus the light spot The position is far from the end face of the bare fiber; adjust the pulse frequency of the excimer laser, turn on the excimer laser, pressurize, turn off the laser, and make a sensor; get a square microhole at the top, and clean the impurities in the hole with hydrofluoric acid solution , a sensor for simultaneous measurement of pressure, temperature and liquid refractive index was fabricated. The tip of the sensor made by the invention has strong structure, small volume, simple manufacture, low cost and good measurement accuracy for temperature, pressure and refraction index.

Description

technical field [0001] The invention relates to the technical field of optical fiber sensor devices, in particular to a preparation method of a novel optical fiber F-P cavity sensor device. Background technique [0002] Compared with traditional sensors, fiber optic sensors have a series of advantages such as low loss, anti-electromagnetic interference, and suitable for high temperature, chemical corrosion and other environments. Optical fiber sensor devices expand the applicable environment of traditional sensors, improve the performance of traditional sensors, and complete tasks that are difficult or even impossible for traditional sensors in many cases. Therefore, they have attracted extensive attention from experts in various fields. [0003] Fiber optic sensors can be used to measure temperature, pressure, stress, flow and many other physical quantities indirectly or directly. Nowadays, fiber optic F-P sensors are hotspots in the research field of fiber optic sensors d...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01D21/02
CPCG01D21/02
Inventor 刘颖刚张庭王玉玺杨丹青刘鑫傅海威贾振安
Owner XI'AN PETROLEUM UNIVERSITY
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