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Mask plate, evaporated mask plate assembly and mask plate manufacturing method

A manufacturing method and a technology of a mask plate, which are applied in vacuum evaporation plating, semiconductor/solid-state device manufacturing, electrical components, etc., can solve the problems of excessive opening position deviation, uneven stress distribution, and affecting the evaporation effect, etc., to reduce The effect of gravity sagging, reducing the overall weight, and improving the quality of vapor deposition products

Inactive Publication Date: 2018-10-02
BOE TECH GRP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

For example, the circular FMM opening area is prone to uneven stress distribution during the stretching process, which makes the opening position deviation too large and affects the final evaporation effect.

Method used

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  • Mask plate, evaporated mask plate assembly and mask plate manufacturing method
  • Mask plate, evaporated mask plate assembly and mask plate manufacturing method
  • Mask plate, evaporated mask plate assembly and mask plate manufacturing method

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Embodiment Construction

[0044]Example embodiments will now be described more fully with reference to the accompanying drawings. Example embodiments may, however, be embodied in many forms and should not be construed as limited to the examples set forth herein; rather, these embodiments are provided so that this disclosure will be thorough and complete and will fully convey the concept of example embodiments to those skilled in the art. The described features, structures, or characteristics may be combined in any suitable manner in one or more embodiments. In the following description, numerous specific details are provided in order to give a thorough understanding of embodiments of the present disclosure. However, those skilled in the art will appreciate that the technical solutions of the present disclosure may be practiced without one or more of the specific details being omitted, or other methods, components, devices, steps, etc. may be adopted. In other instances, well-known technical solutions...

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Abstract

The invention relates to a mask plate, an evaporated mask plate assembly and a mask plate manufacturing method, and relates to the technical field of displaying. The mask plate comprises at least twoauxiliary mask plates, and all the auxiliary mask plates extend in the first direction and comprise a plurality of mask units arranged in the first direction in sequence; the side surfaces, facing towards the auxiliary mask plates adjacent to the corresponding auxiliary mask plates, of the corresponding auxiliary mask plates are provided with protruding parts corresponding to the mask units; all the protruding parts protrude outwards in the second direction which is perpendicular to the first direction; and the protruding parts between the adjacent auxiliary mask plates can be in overlap jointso that all the auxiliary mask plates can be spliced to form the mask plate with a flat surface. According to the mask plate, the evaporated mask plate assembly and the mask plate manufacturing method, the edges of the mask units are provided with the protruding parts, all the protruding parts are in overlap joint, thus, on the one hand, stress of an opening zone is balanced, and the corrugated state of the mask plate after stretching is improved; on the other hand, the distance between the mask plates is decreased so that the space utilization rate can be increased; and on another hand, theoverall weight of the mask plates is decreased so that the gravity ptotic amount of the mask plates can be reduced.

Description

technical field [0001] The present disclosure relates to the field of display technology, and in particular to a mask, an evaporation mask assembly and a method for manufacturing the mask. Background technique [0002] Organic Light Emitting Diode (OLED) displays have the characteristics of self-illumination, thin thickness, low power consumption, wide color gamut and flexible display, etc., so they have attracted the attention of major panel manufacturers. Accelerate the layout of the OLED industry, and there will be a breakthrough development in OLED display devices in the future. [0003] In the production process of existing OLED devices, vacuum evaporation of organic materials is a mainstream process. In this process, the fine metal mask (Fine Metal Mask, FMM) for evaporation is a crucial part. The quality of the luminescent material evaporated to the designed position on the backplane directly affects the display effect of the OLED panel. [0004] In recent years, wi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/04C23C14/12C23C14/24H01L51/56
CPCC23C14/042C23C14/12C23C14/24H10K71/00
Inventor 张浩瀚
Owner BOE TECH GRP CO LTD
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