A three-dimensional precision piezoelectric sensing device

Abstract

The invention discloses a three-dimensional precise piezoelectric sensing device. The problem in the prior art that the detection precision of a sensing device is poor is solved. The three-dimensionalprecise piezoelectric sensing device has the advantages of being capable of achieving three-degree-of-freedom detection and high in sensitivity. The three-dimensional precise piezoelectric sensing device is characterized by comprising a base body and a first plane inner sensing unit, wherein a groove is formed in the base body, and a center frame is formed in the groove; the first plane inner sensing unit comprises force acting belts arranged around the center frame, all the corners of the center frame are connected with the base body through guide mechanisms separately, the output end of thecenter frame is connected with first force amplifying mechanisms, and acting force to the center frame is transmitted to piezoelectric crystal blocks at the corresponding sides after being amplifiedby the first force amplifying mechanisms.

Description

technical field [0001] The invention relates to the field of precision force sensing and precision control engineering, in particular to a three-dimensional precision piezoelectric sensing device. Background technique [0002] Precision force sensing technology is playing an increasingly important role in precision engineering applications, especially in ultra-precision machine tools, atomic force microscopes, aerospace and other fields. At the same time, with the in-depth research in these fields, higher and higher requirements are put forward for the detection of force or non-electric physical quantities that can be converted into force, and the demand for precision sensing devices that can achieve high sensitivity, multiple degrees of freedom, and small coupling more and more exuberant. The current force sensing technology mainly has the following shortcomings: [0003] 1. Since the sensitivity of the sensor itself is certain, the traditional force sensing device is not...

AI Technical Summary

Problems solved by technology

[0003] 1. Since the sensitivity of the sensor itself is certain, the traditional force sensing device is not sensitive to the detection of small changes, and the sensitivity is relatively low;

[0004] 2. Most of the existing force sensing devices have zero point drift phenomenon. For example, when the insulation resistance of the strain gauge is too low or the current generates heat, the strain value will change with time under the condition of no force;

[0005] 3. Most of the existing force sensing devices focus on single-axis detection, or there are serious coupling phenomena in multi-axis detection, which affects the detection accuracy

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