MEMS-IMU (Micro-electromechanical Systems-Inertial Measurement Unit) full-temperature and full-parameter calibration and compensation method

Abstract

The invention provides an MEMS-IMU (Micro-electromechanical Systems-Inertial Measurement Unit) total-temperature and total-parameter calibration and compensation method. Temperature-control rotary table calibration and precise centrifugal calibration are tightly combined to complement each other and have a complementary action; the temperature-control rotary table calibration is used for calibrating a zero offset, a temperature coefficient, a scale coefficient, an installation coupling error and a non-linear error of a gyroscope in an MEMS-IMU, and zero offset and a temperature coefficient ofan accelerometer; the precise centrifugal calibration can be used for calibrating an acceleration effect coefficient of the gyroscope, and a scale factor, an installation coupling error, non-linear error, a lever arm effect and the like of the accelerometer; total-error parameters of the MEMS-IMU under a total-temperature state can be accurately calibrated, so that the precision of the MEMS-IMU inan actual application process is improved.

Description

technical field [0001] The invention relates to the field of inertial device testing, and particularly designs a MEMS-IMU full-temperature full-parameter calibration compensation method. Background technique [0002] MEMS inertial sensors have the characteristics of small size, low cost, light weight and strong environmental adaptability, making them widely used in various fields. Aiming at the problem of its poor precision, related fields have launched researches to improve its precision. There are two main ways to improve the accuracy of MEMS-IMU. One is to research or purchase a higher-precision MEMS inertial sensor, which will inevitably bring about a substantial increase in time and cost; the other method is to correct the error of the MEMS inertial sensor. Carry out calibration compensation, improve its use accuracy, this method is low in cost, simple and easy to implement. [0003] The conventional MEMS-IMU calibration method is to calibrate each axis gyroscope and ...

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Problems solved by technology

[0003] The conventional MEMS-IMU calibration method is to calibrate each axis gyroscope and the cross-coupling between each other through the rate turntable, and use the six-position method to calibrate the accelerometer in the case of the earth's gravity acceleration ±1g input. Carry out calibration, and then identify the temperature characteristics of the MEMS-IMU by putting the MEMS-IMU in an incubator to collect the zero-bias changes of the inertial devices at different temperatures. This calibration method is cumbersome and time-consuming. In addition, the MEMS-IMU Various temperature characteristics are not easy to be discovered, resulting in low calibration accuracy of MEMS-IMU

[0004] According to its temperature characteristics, there is also a method of calibrating MEMS-IMU through the thermostat turntable alone. Although this method can calibrate the temperature coefficient and most error parameters of the gyroscope and accelerometer, it is difficult to calibrate all error parameters in the full temperature state. It is not comprehensive enough, this method cannot calibrate the error coefficient of the gyro with the acceleration change, and can only calibrate the output of the accelerometer when the input is ±1g, and the situation when the acceleration is other values ​​must be considered in the actual application process, so this method can not obtain higher calibration accuracy

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