Method and device for three-dimensional curved surface nano imprinting, and die preparation method

Abstract

The invention provides a method and a device for three-dimensional curved surface nano imprinting, and a die preparation method, relating to nano imprinting. The nano imprinting device comprises a mother template, a base, a PDMS adhesive layer, and a holding mechanism, wherein a set concave-convex shape is arranged at the top of the mother template, an imprinted three-dimensional curved surface isarranged at the top of the base, the bottom surface of the PDMS adhesive layer and the top of the mother template are cured and then cover the imprinted three-dimensional curved surface, the holdingmechanism is but-jointed and cured with the PDMS adhesive layer covering the imprinted three-dimensional curved surface, so as to cure the bottom surface of the PDMS adhesive layer to obtain an imprinting die imprinting the set concave-convex shape onto the imprinted three-dimensional curved surface, so that the set concave-convex shape is imprinted onto the imprinted three-dimensional curved surface, that is, a micro-structure is imprinted onto a base of the curved surface.

Description

technical field [0001] The invention relates to nanoscale imprinting, in particular to a method, device and mold preparation method for three-dimensional curved surface nanoscale imprinting. Background technique [0002] Nanoimprint technology is a new type of nanostructure pattern transfer technology. The pattern is transferred by pressing a template with a concave-convex nanostructure to a substrate uniformly coated with a thin polymer layer by a certain pressure; The assembly is subjected to methods such as heating or UV exposure to shape the nanostructure; after the template is removed, an imprint of the original concave-convex nanostructure pattern is left on the substrate coated with a thin polymer layer. The nanoimprinting process described above is simple to operate and has high work efficiency, and each substrate imprinting process only takes a few minutes. [0003] The existing nanoimprinting method uses a certain pressure to press templates with concave-convex na...

AI Technical Summary

Problems solved by technology

[0003] The existing nanoimprinting method uses a certain pressure to press templates with concave-convex nanostructures parallel to each other and a substrate uniformly coated with a thin polymer layer to realize the transfer of micro-nano patterns between two plates. Traditional imprinting methods cannot achieve imprinting of microstructures on curved substrates

Images