Light path alignment method for convex aspheric surface reflector detection

Abstract

The invention relates to a light path alignment method for convex aspheric surface reflector detection and belongs to the technical field of optical detection. The method is characterized by realizingcoarse alignment between an interferometer and a Handel ball by utilizing a scale mark device fixed at the back face of the Handel ball; realizing perfect alignment between the interferometer and theHandel ball by utilizing a cat eye image of an interferometer spherical standard mirror; and after finishing light path alignment between the interferometer and the Handel ball, carrying data processing on a surface interference image of a convex aspheric surface reflector to be detected collected by the interferometer, and determining whether light path alignment between the Handel ball and theconvex aspheric surface reflector to be detected is realized by judging whether an outer circle data center and an inner hole data center of the surface interference image obtained after data processing are overlapped, thereby solving the problem of alignment between the convex aspheric surface reflector to be detected and the whole optical detection system in the process of adopting the Handel ball to carry out convex aspheric surface reflector detection.

Description

technical field [0001] The invention relates to the technical field of optical detection, in particular to an optical path alignment method for detection of convex aspheric mirrors. Background technique [0002] For the mirror of the coaxial structure aerospace camera, the convex aspheric mirror is usually used as the secondary mirror of the camera. The surface shape accuracy, the size and shape of the effective area of ​​the convex aspheric mirror are directly related to the final imaging quality of the aerospace camera. and area, so the high-precision detection of the surface shape and effective area of ​​the convex aspheric mirror is of great significance to the entire aerial camera. [0003] For the detection of the surface shape and effective area of ​​a convex aspheric mirror, the following two methods are usually used: the first is to use the optical compensation method, using a transmission compensator or a computer generated hologram (Computer Generated Hologram, CG...

AI Technical Summary

Problems solved by technology

[0005] Based on this, it is necessary to align the optical paths of the interferometer, Handel sphere and the mirror to be inspected only by visual inspection in the prior art, resulting in a certain inclination and eccentricity between the three, which cannot meet the requirements of non-convex and non-convex alignment. The problem of high-precision detection of the surface shape and effective area of ​​spherical mirrors provides an optical path alignment method for the detection of convex aspheric mirrors

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