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High-precision piezoceramic scanner

A technology of piezoelectric ceramics and piezoelectric ceramic tubes, applied in the field of electron microscopy, can solve the problems of low production success rate, high cost, and immaturity, and achieve the effect of simple process production, high success rate, and low cost

Pending Publication Date: 2018-01-16
苏州海兹思纳米科技有限公司
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  • Abstract
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  • Application Information

AI Technical Summary

Problems solved by technology

The piezoelectric ceramic scanners currently used in the market mainly include tripod type, single-tube type and multi-tube type, etc. The tripod type scanner is complicated to manufacture and the cost is high, while the multi-tube piezoelectric ceramic scanner has a relatively large scanning range. Large, but at the cost of sacrificing scanning accuracy. At the same time, multi-tube splicing requires extremely high concentricity of the tubes. The current technology is not mature enough, and the production success rate is low.

Method used

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Embodiment Construction

[0012] The present invention is described in further detail now in conjunction with accompanying drawing. The accompanying drawings are simplified schematic diagrams, which only illustrate the basic structure of the present invention in a schematic manner, so that they only show the components relevant to the present invention.

[0013] see figure 1 , figure 2 , image 3 and Figure 4 , a high-precision piezoelectric ceramic scanner, including a bracket 1, a piezoelectric ceramic tube body 2, a housing 7, a cover 8, a wire one 11, a wire two 12, a connector 13 and a ceramic tube 19, and the bracket 1 is fixed on Inside one end of the shell 7, the cover 8 is fixed on the other end of the shell 7, one end of the piezoelectric ceramic tube body 2 is fixed on the bracket 1 inside the shell 7, and one end of the piezoelectric ceramic tube body 2 The other end is provided with an insulating sleeve 4, the insulating sleeve 4 is provided with a conductive base 6, and the insulati...

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Abstract

The invention relates to the technical field of electron microscopes and particularly relates to a high-precision piezoceramic scanner. The high-precision piezoceramic scanner comprises a support, a piezoelectric tube body, a shell, a cover, a first wire, a second wire, a connector and a ceramic tube, wherein the support is fixed inside one end of the shell. according to the high-precision piezoceramic scanner provided by the invention, while the scanning precision is ensured, the making process is simple, the success rate is high, the cost is low, the high-precision piezoceramic scanner can be applied to a scanning tunneling microscope and a scanning probe microscope, and industrial production is facilitated.

Description

technical field [0001] The invention relates to the technical field of electron microscopy, in particular to a high-precision piezoelectric ceramic scanner. Background technique [0002] Piezoelectric ceramic scanner is one of the core components of scanning tunneling microscope (STM) and scanning probe microscope (SPM). , and it is also the direct source of measurement data, so it has a great influence on the measurement accuracy and measurement range of STM and SPM. The piezoelectric ceramic scanners currently used in the market mainly include tripod type, single-tube type and multi-tube type, etc. The tripod type scanner is complicated to manufacture and the cost is high, while the multi-tube piezoelectric ceramic scanner has a relatively large scanning range. Large, but at the expense of scanning accuracy. At the same time, multi-tube splicing requires extremely high concentricity of the tubes. The current technology is not mature enough, and the production success rate...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01Q30/00
Inventor 熊启红张贤朱峥嵘黄大刚
Owner 苏州海兹思纳米科技有限公司
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