Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

A precision micro-displacement detection device and method based on micro-lens moiré imaging

A detection device and micro-displacement technology, applied in the direction of measuring devices, optical devices, instruments, etc., can solve problems such as difficult measurement methods, and achieve the effects of flexible methods, simple mechanical mechanisms, and clear principles

Active Publication Date: 2020-06-02
SUZHOU UNIV
View PDF6 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Future displacement measurement requires sub-nanometer or higher resolution in the range of tens of millimeters or more, which is difficult to achieve by relying on a single measurement method

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • A precision micro-displacement detection device and method based on micro-lens moiré imaging
  • A precision micro-displacement detection device and method based on micro-lens moiré imaging
  • A precision micro-displacement detection device and method based on micro-lens moiré imaging

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0046] Embodiment one: see attached figure 1 As shown, a schematic diagram of a micro-displacement detection device based on the principle of Moire imaging. The detection table 14 carries the micro-image-text array area 11 for the detection of the micro-displacement of the moiré image of the present invention. The microlens array area 12 and the image recording mechanism 13 are located on another mechanical structure that can move relative to the platform to be tested. The micro-lens array area 12 is used to cooperate with the micro-text array area 11 on the detection table 14 to form a moiré image. The image recording mechanism 13 has the functions of illumination, image miniaturization and image recording. The relative translation and rotation between the detection table 14 and the image recording mechanism 13 will affect the position, size and orientation of the moiré image. The micro-text array area 11 of the platform to be tested is in the range of 50% to 150% of the f...

Embodiment 2

[0047] Embodiment two: see attached Figure 2a-2c As shown, a micro-displacement detection method based on the Moire imaging principle and a schematic diagram of the arrangement of the micro-lens array in the device. This arrangement can be a regular square arrangement, as attached Figure 2a shown, or a regular honeycomb arrangement, as attached Figure 2b shown; or non-periodic and irregular arrangement, as attached Figure 2c shown. The diameter of the microlens is 10 to 1000 microns, and the numerical aperture of the microlens is 0.1 to 4.0. In the preferred technical solution, the aperture size of the microlens is 50 to 500 microns; the numerical aperture of the microlens is less than 2.0. Microlens arrays can be cylindrical, spherical or aspherical. The ratio of the area where the microlens is located to the total area is called the duty cycle. The higher the duty cycle, the higher the contrast of the enlarged graphics obtained. Such as Figure 2a The shown squar...

Embodiment 3

[0048] Embodiment three: see attached Figure 3a~3c As shown, a micro-displacement detection method based on the Moire imaging principle and a schematic diagram of the arrangement of the micro-text array in the device. The arrangement can be a regular square arrangement, as attached Figure 3a shown, or a regular honeycomb arrangement, as attached Figure 3b shown; or non-periodic and irregular arrangement, as attached Figure 3c shown. The micrographic array is composed of at least two of microprinted patterns, surface microrelief micropatterns filled with pigments or dyes, line structure micropatterns or printed patterns, surface microrelief micropatterns filled with pigments or dyes, and line structure micropatterns combination composition. The micro-text in the micro-text layer can be graphics, text, or a mixture of graphics and text; ordinary printed text can be used, and micro-nano structures can also be used, for example, it can be a one-dimensional grating, The gr...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention discloses a precision micro displacement detection method and a device based on microlens moire imaging. The device is characterized by comprising a detection table and a micro displacement recording device, wherein the micro displacement recording device comprises a moire image forming mechanism, an image recording mechanism and an upper computer; the moire image forming mechanism comprises a micro teletext array located on the detection table and a microlens array arranged oppositely to the micro teletext array; the microlens array is arranged at one side, facing the micro teletext array, of the image recording mechanism; the image recording mechanism is connected with the upper computer; the image recording mechanism transmits a recorded image to the upper computer; and the upper computer extracts movable micro displacement for the image. A moire amplification image is used as a detection marker, and the micro displacements in four dimensions of (x, y, theta, z) can bedetected at the same time.

Description

technical field [0001] The invention relates to a precision micro-displacement detection device and method based on microlens Moiré imaging. Based on the principle of microlens Moiré imaging, it is composed of an image sensing element, a microlens array and a microimage array, and simultaneously realizes multi-dimensional (x, y , θ, z) Precision detection, the accuracy in the three dimensions of the working plane can reach sub-micron level. The method and device can be used in the fields of micro-nano device processing and technology. Background technique [0002] The advancement of science and technology and the rapid development of precision manufacturing put forward higher requirements for the resolution and accuracy of displacement measurement. There are more and more detection methods for small displacement, and the measurement accuracy is also continuously improved. At present, the high-resolution micro-displacement measurement technology is mainly divided into two t...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/02
Inventor 申溯郑伟伟
Owner SUZHOU UNIV
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com