Temperature sensor based on surface plasma resonance and production method thereof

Abstract

The invention discloses a temperature sensor based on surface plasma resonance and a production method thereof. The temperature sensor comprises a light source transmitter, a sensing device and a spectrograph, wherein the output end of the light source transmitter is connected with the input end of the sensing device, the output end of the sensing device is connected with the input end of the spectrograph, the sensing device comprises a side-polished single-mode optical fiber, a gold film and a temperature-sensitive thin film, the gold film is deposited on the polished side of the side-polished single-mode optical fiber, and the temperature-sensitive thin film is solidified on the gold film. The temperature sensor has the advantages the due to the fact that the solid temperature-sensitive thin film is solidified on the gold film and does not have flowability as a liquid material, the liquid encapsulation procedure in the prior art is omitted, and the production process is simplified; in addition, due to the fact that the solid temperature-sensitive thin film is not evident in thermal expansion effect, device structure stability is increased, and application of the temperature sensor in fields such as biochemistry is not limited.

Description

technical field [0001] The invention belongs to the technical field of sensors, in particular to a temperature sensor based on surface plasmon resonance and a preparation method thereof. Background technique [0002] The existing surface plasmon resonance (Surface Plasmon Resonance, SPR) based temperature sensor needs to encapsulate the liquid material on the surface of the temperature sensor, and detect the ambient temperature through the thermo-optic effect of the liquid material. However, due to the liquid material has Fluidity, so packaging is difficult, resulting in complex preparation process, and because of the obvious thermal expansion effect and unstable structure, it is prone to explosion when the temperature is too high, which limits its application in biochemical and other fields. [0003] Therefore, the existing SPR-based temperature sensors are difficult to package due to the fluidity of the liquid material, resulting in a complicated manufacturing process, and...

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Problems solved by technology

[0004] The main purpose of the present invention is to propose a temperature sensor based on surface plasmon resonance, which aims to solve the problem of the existing SPR-based temperature sensor due to the fluidity of the liquid material, so the packaging is difficult, resulting in a complicated preparation process, and due to the Its thermal expansion effect is obvious, its structure is unstable, and it is prone to explosion when the temperature is too high, which limits its technical problems in the application of biochemistry and other fields.

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