Two-dimensional rapid deflection table combining sensing unit with constraint element and method

Abstract

The invention discloses a two-dimensional rapid deflection table combining a sensing unit with a constraint element and a method. The deflection table comprises an X axis angle displacement sensing measurement device and a Y axis angle displacement sensing measurement device which are located between a micro-angle swinging platform and a base and further comprises four linear voice coil motors, and a double-axis flexible hinge is arranged on the lower surface of the micro-angle swinging platform. The X axis angle displacement sensing measurement device and the Y axis angle displacement sensing measurement device each comprise a rigid support, a pair of flexible metal beams which extend out relative to the two sides of the rigid support and mass blocks which are fixedly connected with the tail ends of the flexible metal beams correspondingly. The positions, nearby the root, of the upper surface and the lower surface of each flexible metal beam are provided with electric resistance strain gauges in an attachment mode. The first voice coil motor and the third voice coil motor are oppositely arranged with the same specification and form a first actuator set. The second voice coil motor and the fourth voice coil motor are oppositely arranged with the same specification and are perpendicular to the first actuator set in a crossing mode. The voice coil motors are adopted for driving to achieve large angular travel, the constraint rigidity of the deflection table is improved through the flexible metal beams, and the mechanism stability is improved; and meanwhile, the deflection table serves as the sensing unit to perform real-time measurement of double-axis deflection angles in a strain feedback mode.

Description

technical field [0001] The invention relates to the technical field of micro-angular displacement two-dimensional rapid deflection actuation, in particular to a two-dimensional rapid deflection table integrating a sensing unit and a constraint element, an actuation method and a micro-angle sensing and measuring method. Background technique [0002] In recent years, with the rapid development of microelectronics engineering, aerospace engineering, bioengineering and other fields, micro-angle two-dimensional fast deflection tables have been widely used in astronomical telescopes, image stabilization control, precise pointing of spacecraft communications, and satellite imaging. and play an increasingly important role. Although the current piezoelectric-driven micro-angle actuating platform is small in size and high in resonant frequency, it has disadvantages such as high driving voltage and small actuating stroke, and the actuating mechanism often needs to install additional de...

AI Technical Summary

Problems solved by technology

Although the current piezoelectric-driven micro-angle actuating platform is small in size and high in resonant frequency, it has disadvantages such as high driving voltage and small actuating stroke, and the actuating mechanism often needs to install additional devices such as eddy current displacement sensors to measure Biaxial deflection angle

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