Lorentz force motor direct drive inductance sensor calibration device
An inductive sensor, calibration device technology, applied in the direction of using electrical devices, measuring devices, instruments, etc., can solve the problems of low accuracy, small calibration stroke, small calibration stroke, etc., to ensure the calibration accuracy, improve the calibration stroke, and eliminate errors. Effect
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[0020] Below in conjunction with accompanying drawing, the present invention is described in further detail:
[0021] A Lorentz force motor direct-driven inductance sensor calibration device, the method and device are as follows: the whole device is mainly divided into three parts: a displacement reference instrument, a displacement transmission mechanism and a displacement sensor to be calibrated. The whole device is placed on a vibration isolation platform and placed in a constant temperature environment. The calibrated displacement sensor adopts the inductive displacement sensor 3, and the inductive displacement sensor 3 is clamped and fixed by the sensor clamping arm 2, and the position of the inductive displacement sensor 3 is adjusted to ensure that the movement axis of the probe 3a of the inductive displacement sensor 3 is in line with the dual-frequency laser The optical axes of the measuring beam 7 a of the interferometer 7 are collinear, the sensor support 1 is insta...
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