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Elastic clamping device

A clamping device and elastic technology, applied in metal material coating process, vacuum evaporation plating, coating and other directions, can solve the problems of film stability decline, substrate size change, etc., and achieve easy processing, simple loading and unloading, and cost. cheap effect

Inactive Publication Date: 2017-06-13
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The problem to be solved by the present invention is that the size of the substrate changes due to the processing error and temperature change of the substrate during the coating process, resulting in a decrease in film stability caused by stress.

Method used

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Embodiment Construction

[0017] see first figure 1 , figure 1 It is an exploded view of an embodiment of the elastic clamping device of the present invention. It can be seen from the figure that the elastic clamping device used for fixing the substrate in the coating of the present invention includes a substrate clamp 1, a plurality of elastic fixing blocks 3, a cover plate 4 and bolts 8, and the substrate clamp 1 is a round cup shaped cavity, the center of the bottom of the cavity is a coating hole 9, three spring holes 6 are evenly distributed on the inner wall of the cavity, and two screw holes 5 are arranged on the upper end surface of the cavity wall. The elastic fixing block 3 It is composed of a spring and a fixed block transversely welded. The fixed block is square. The lower end surface of the fixed block has a gap that fits with the substrate to be coated. The elastic fixed block 3 is placed on the said fixed block by a spring. In the spring hole 6 of the inner wall of the substrate holder...

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Abstract

An elastic clamping device for fixing a substrate in coating, which consists of a substrate clamp, a plurality of elastic fixing blocks, a cover plate and bolts, through which the elastic fixing block fixes the substrate placed in the substrate clamp, and through Bolts secure the cover to the substrate holder. There will be a certain dimensional error in the process of substrate processing. During the coating process, the dimensional error of the substrate is too small, and vibration or temperature drop will cause loosening, which will reduce the performance of the coated film. At the same time, due to the large dimensional error of the substrate, Vibration and temperature rise lead to excessive stress when the substrate is fixed, and even phenomena such as carding and chipping occur, which also affect the performance of the film. The invention makes the substrate fixed in the fixture, which can eliminate the stress of the substrate caused by size error, vibration and temperature rise during film coating. The device has the characteristics of simple structure, low cost, long service life, strong versatility and convenient use.

Description

technical field [0001] The invention relates to a coating film, in particular to an elastic clamping device for fixing a substrate in the coating film. Background technique [0002] Thin film technology has been widely used in various fields such as electronic components, integrated optics, electronic technology, infrared technology, laser technology, aerospace technology and optical instruments. They have not only become an independent application technology, but also become a material surface modification. And an important means of improving certain technological levels. [0003] The coating process will directly affect the quality of the film, and will also affect the performance of the film, such as the thermoelectric, ferroelectric and piezoelectric properties of the functional film, the spectral characteristics of the optical film, the anti-laser damage characteristics, the density, internal stress, and The uniformity of the film layer, the surface finish, the adsorpt...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/50
CPCC23C14/50
Inventor 王胭脂郭可升陈宇刘加朱晔新朱美萍张伟丽王建国赵娇玲孙建齐红基易葵邵建达
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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