Independently controllable high-temperature equipment provided with multiple vacuum cavities

Abstract

The invention discloses independently controllable high-temperature equipment provided with multiple vacuum cavities. The independently controllable high-temperature equipment provided with the multiple vacuum cavities comprises the first vacuum cavity, the second vacuum cavity, the third vacuum cavity, a first sealing door, a second sealing door, a third sealing door, a vacuum-pumping system, a display control system and a cabinet body, wherein the first vacuum cavity, the second vacuum cavity and the third vacuum cavity have the same constitution; each vacuum cavity comprises a left-side heat radiation chamber, a right-side heat radiation chamber and a work chamber positioned between the left-side heat radiation chamber and right-side heat radiation chamber; the vacuum-pumping system consists of a molecular pump, a forepump, a prepump and a vacuum electromagnetic valve; one set of vacuum-pump system can vacuumize the plurality of cavities; the prepump is used for performing first-state vacuumization on the vacuum cavities; the forepump is used for maintain the vacuumizing work of the molecular pump and also can serve as the prepump when necessary; the vacuum time of the whole system is short; and independently controllable high-temperature equipment provided with the multiple vacuum cavities can realize that the plurality of vacuum cavities can be independently controlled and display, can realize single stop and restart operation, and realizes non-interference truly.

Description

technical field [0001] The invention relates to the field of packaging or storage in a vacuum and high-temperature environment after the outgassing treatment of the complete machine or parts, and specifically relates to a high-temperature storage device with multiple vacuum chambers that can be independently controlled. Background technique [0002] Vacuum high-temperature storage equipment is widely used in electronic products, optical parts, food hygiene, medical treatment, scientific research and teaching, industry and other fields. It can provide a vacuum and high temperature conditions for drying, heating and vacuum storage of equipment. Especially in the production and testing of electronic instruments and component products, vacuum high-temperature storage equipment plays an important role. [0003] At present, vacuum high-temperature storage equipment is mostly designed as a single vacuum chamber, so that a batch of complete machines or parts must be put in or taken ...

AI Technical Summary

Problems solved by technology

[0003] At present, vacuum high-temperature storage equipment is mostly designed as a single vacuum chamber, so that a batch of complete machines or parts must be put in or taken out in batches during the test storage process, which will bring great inconvenience to the test or production. ;In order to ensure the test or production node, some vacuum high-temperature storage equipment is designed as multiple vacuum chambers, but each chamber corresponds to a set of vacuum pumping system to ensure that each vacuum chamber does not interfere with each other, which will cause equipment costs and increased energy consumption

Images