Inchworm-type precise linear micro-actuator based on complaint mechanism

Abstract

The invention discloses an inchworm-type precise linear micro-actuator based on a complaint mechanism. The inchworm-type precise linear micro-actuator comprises driving mechanisms, two clamping mechanisms and stators, wherein each driving mechanism consists of four symmetrically arranged driving branch chains and one pair of stators, each driving branch chain consists of two lever structures, the driving branch chains are connected to the stators by adopting flexible hinges, and reciprocating micromovement can be performed relative to the stators; each clamping mechanism consists of three pairs of flexible hinges, one pair of levers and one pair of clamping pieces which are symmetrically arranged, and the two clamping mechanisms are symmetrically connected to two ends of each driving mechanism through the levers; the stators are of long and thin cylinder-shaped structures, are arranged at the symmetrical center of the micro-actuator, are matched with the clamping mechanisms through holes, are matched with the driving mechanisms through through grooves, and can move in the holes and the through grooves. The clamping mechanisms are driven by the driving mechanisms to carry out reciprocating motion, and the stators are driven by the clamping mechanisms to perform a bionic inchworm motion law in the motion manner of linear motion. The disclosed micro-actuator can be used in the fields of ultra-precision machining, precision engineering, micro electro mechanical systems, bioengineering, semiconductor manufacturing and the like.

Description

technical field [0001] The invention relates to an inchworm-type precision linear micro-driver based on a compliant mechanism, which belongs to the field of precision micro-operation and is mainly used in ultra-precision machining, precision engineering, micro-electromechanical systems (MEMS), microelectronics engineering, biological engineering, semiconductor manufacturing, etc. Cutting-edge science and technology fields. Background technique [0002] With the rapid development of micro-machining, ultra-precision machining and measurement, precision optical engineering, bioengineering, modern medicine, semiconductor manufacturing, aerospace and other fields, the traditional linear actuator is limited by its working principle and mechanical structure, and has been unable to meet the ultra- The requirements of precise and high-precision positioning urgently require ultra-precise linear micro-drivers with nanometer-level and sub-nanometer-level precision to realize their funct...

AI Technical Summary

Problems solved by technology

However, the current inchworm linear actuator still has problems such as low operating speed, small output load, and poor motion stability.

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