A focused shock wave excitation device that can excite mems microstructures in water

Abstract

The invention discloses a focused shock wave excitation device capable of exciting MEMS microstructures in water, which comprises a support arranged on a substrate and an ellipsoid cavity, and the ellipsoid cavity is formed by connecting a lower cavity and an upper cavity. and the inner cavity forms more than half of an ellipsoid; there is a mounting seat in the lower cavity, and two needle electrodes are arranged on the upper end of the mounting seat; the needle points of the two needle electrodes are located on the cross section of the first focus of the ellipsoid; The microstructure unit is installed through a manual three-axis translation stage, and the microstructure unit is located at the second focal point of the ellipsoid; the needle electrodes are electrically connected to the two poles of the high-voltage capacitor, and the distance between the needle tips of the needle electrodes is less than the maximum value in water after the high-voltage capacitor is fully charged. The air breakdown gap; the two poles of the high-voltage capacitor are electrically connected to the positive and negative poles of the high-voltage power supply. The device can not only excite the MEMS microstructure in water, but also prevent the vibration response of the base structure from interfering with the test results, realize the non-contact excitation of the microstructure, and have good excitation effect.

Description

technical field [0001] The invention belongs to the technical field of micromechanical electronic systems, in particular to a focused shock wave excitation device capable of exciting MEMS microstructures in water. Background technique [0002] Due to the advantages of low cost, small size and light weight, MEMS microdevices have broad application prospects in many fields such as automobile, aerospace, information communication, biochemistry, medical treatment, automatic control and national defense. For many MEMS devices, the micro-displacement and micro-deformation of their internal microstructures are the basis for the realization of device functions. Therefore, accurate testing of dynamic characteristic parameters such as the amplitude, natural frequency, and damping ratio of these microstructures has become the key to developing MEMS products. important content. In addition, the dynamic characteristic test of MEMS microstructure needs to take into account the working en...

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Problems solved by technology

However, the working principle of this device is to use the shock wave generated by the needle electrode and the plate electrode to discharge in the air to excite the microstructure, so it cannot be used to excite the microstructure in water. In addition, the device uses a base excitation Therefore, when using the non-contact optical vibration measurement method to test the dynamic characteristics of the microstructure, the vibration response signal obtained will inevitably include the vibration response of the base structure, which will make the acquisition The dynamic characteristic parameters of the microstructure become very difficult

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