Dynamic plasma generation device based on modulated radio frequency
A plasma and generating device technology, applied in the field of plasma, can solve the problems of difficult manual control of plasma, poor dynamic performance, etc., and achieve the effects of improving dynamics, speeding up exchange rate, and improving heat dissipation efficiency
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[0029] The present invention will be described in further detail below in conjunction with the accompanying drawings and embodiments.
[0030] refer to figure 1 , the present invention includes a plasma discharge cavity 1, an annular high-voltage electrode 2, a vacuum system 3, a cooling system 4, a plasma dynamic waveform generator 5, a modulated radio frequency power supply 6, a radio frequency matcher 7, a radio frequency shielding interface 8 and a first electromagnetic The experimental shielding chamber 9 and the second electromagnetic experimental shielding chamber 10 .
[0031]The plasma discharge cavity 1 includes a first wave transparent window 101 and a second wave transparent window 102 , an electrode interface 103 and an insulating and airtight block 11 . The plasma discharge cavity 1 adopts a cylindrical structure provided with a cylindrical cavity, and its two ends are respectively provided with a first wave-transmissive window 101 and a second wave-transparent ...
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