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Method for calibrating PZT displacement based on white light interference

A white light interference and white light interferometer technology, which is applied to measurement devices, optical devices, instruments, etc., can solve the problems of inability to adapt to changes in the displacement characteristics of PZT itself, difficulty in real-time calibration, and a large amount of calculation. The effect of low cost and small amount of calculation

Inactive Publication Date: 2016-12-14
NANJING UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

These methods have a large amount of calculation, high requirements, and are difficult to calibrate in real time, and cannot adapt to the change of PZT's own displacement characteristics caused by the external environment during use.

Method used

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  • Method for calibrating PZT displacement based on white light interference
  • Method for calibrating PZT displacement based on white light interference
  • Method for calibrating PZT displacement based on white light interference

Examples

Experimental program
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Effect test

Embodiment 1

[0041] The steps of the present invention are as follows:

[0042] Step 1: Build an experimental device based on the method of calibrating PZT displacement based on white light interference:

[0043] Fix the PZT 2 and the body 4 on the rigid table 3, the rigid table 3 is set on the stage 8 of the white light interferometer 1, the PZT 2 is set on the side of the body 4, and the top surfaces of the two form a stepped surface 6. The PZT 2 power supply terminal is connected to an adjustable power supply 7 of 0-200V, and the objective lens of the white light interferometer 1 is set directly above the step surface 6; the computer 5 is connected to the white light interferometer 1 .

[0044] Step 2: Slowly move the objective lens of the white light interferometer 1 downward, find the best confocal surface positions on the top surface of the body 4 and the top surface of the PZT 2, respectively, and set the test parameters. The specific method is as follows:

[0045]Roughly adjust th...

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Abstract

The invention discloses a method for calibrating PZT displacement based on white light interference, which relates to the field of light interference measurement. The method comprises the following steps: first establishing an experimental apparatus of the method for calibrating the PZT displacement based on white light interference, and allowing a top surface of PZT and a top surface of a backing body to form a step surface; then tuning an adjustable voltage source, changing an input voltage at two ends of the PZT, measuring step heights at different voltage values by virtue of a white light interferometer, wherein the difference between the step height at the voltage value and the step height at the voltage of 0V is the corresponding displacement of the PZT; and further obtaining a dynamic displacement curve of the PZT in the rising and return processes of the voltage, and achieving a purpose of calibrating the PZT displacement. The method is relatively high in precision, convenient to operate, simple in structure, good in real-time performance and low in cost.

Description

technical field [0001] The invention relates to the field of optical interferometric measurement and testing, in particular to a method for calibrating PZT displacement based on white light interference. Background technique [0002] Piezoelectric ceramics (PZT) are information-functional ceramic materials that can convert mechanical energy to electrical energy. When an electric field is applied in the polarization direction of PZT, PZT will be deformed in a certain direction, and this deformation can be pressure or thrust. When the applied electric field is removed, the corresponding deformation will recover within a certain voltage range. PZT is used in a wide range of applications, including sound transducers, ultrasonic transducers, piezoelectric ignition devices, and more. [0003] As a micro-displacement device with small volume and high displacement resolution, PZT plays an important role in stretching fiber gratings and changing the reflection characteristics of fi...

Claims

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Application Information

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IPC IPC(8): G01B11/02
CPCG01B11/02
Inventor 马骏王朕朱日宏
Owner NANJING UNIV OF SCI & TECH
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