Sensitive structure and accelerometer with super-high acceleration displacement sensitivity and manufacturing method

Abstract

The invention discloses a sensitive structure and accelerometer with super-high acceleration displacement sensitivity and a manufacturing method. The micromechanical sensitive structure comprises a sensitive mass block, a high-reflective film plated on the sensitive mass block, an S-shaped beam type cantilever beam connected to the sensitive mass block and a silicon substrate connected with the tail end of the S-shaped beam type cantilever beam. The lower portion of the micromechanical sensitive structure is connected with a substrate with a groove. The S-shaped beam type cantilever beam is mainly formed by sequentially connecting four straight beams of a thigh beam, a first curved beam, a second curved beam and a shank beam. The sensitive mass block and the silicon substrate are both made of SOI substrates. The cantilever beam is made of a monocrystalline silicon device layer in the SOI substrate. According to the sensitive structure and accelerometer, the super-high acceleration displacement sensitivity is achieved, small off-axis crosstalk can still be kept, a micromachining process and an IC process can be compatible, the substrate conveying rate is high, mass manufacturing is easy, and in cooperation with a displacement reading-out system based on a grating interference cavity, super-high acceleration measuring sensitivity and precision can be achieved.

Description

technical field [0001] The invention belongs to the technical field of optical micro-acceleration sensors, and relates to a sensitive structure with ultra-high acceleration displacement sensitivity, an accelerometer and a manufacturing method. Background technique [0002] Accelerometers with ultra-high acceleration measurement sensitivity play a vital role in applications such as inertial navigation, microgravity detection, etc. At the same time, in order to meet the needs of miniaturized and high-precision military equipment and strategic weaponry, designing and manufacturing miniaturized high-performance accelerometers has become the focus of accelerometer research at this stage. The basic measurement principle of the accelerometer is based on Newton's second law, which usually consists of two parts: a mechanically sensitive structure and a displacement readout system. The sensitive mass block in the mechanically sensitive structure is affected by the external accelerati...

AI Technical Summary

Problems solved by technology

Existing micro-accelerometers cannot obtain ultra-high acceleration measurement sensitivity because they do not have a micro-mechanical sensitive structure with ultra-high acceleration displacement sensitivity and its manufacturing method

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