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Pressure sensor

A pressure sensor, sensor technology, applied in the direction of measuring fluid pressure, instruments, measuring fluid pressure through electromagnetic components, etc.

Active Publication Date: 2016-08-03
EHNDRESS KHAUZER GMBKH KO KG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0008] With dry pressure sensors, the installation of the pressure sensor or the measuring diaphragm at the point of use, which is as deformation-free as possible, poses significant problems at low temperatures

Method used

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Embodiment Construction

[0061] figure 1 A section through an exploded view of a pressure measuring device with a pressure sensor according to the invention is shown. The pressure sensor comprises a solid metal sensor body 1 with a front region 3 and a base 5 adjoining the front region 3 and parallel to the longitudinal axis of the pressure sensor. The front area 3 has the basic shape of a disc, the longitudinal axis of the pressure sensor passing through the center of the front area 3 .

[0062] In the front region 3 of the sensor body 1 there is provided a recess 7 which is open towards the front side of the front region 3 facing away from the base 5 and which is flush with the front side of the sensor body 1 .

[0063] A metal measuring diaphragm 9 is arranged on the front side of the pressure sensor, which is elastically deformable depending on the pressure and which completely covers the recess 7 and closes it to the outside. Here, the outer edge of the measuring diaphragm 9 , which externally ...

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Abstract

The invention relates to a pressure sensor that can be used at low temperatures, in particular at temperatures below -70 DEG C, comprising: a solid metal sensor body (1), having a front region (3) and a base (5) adjoining thereto, the front region (3) of which has a larger cross-sectional area than the base (5), and the front region (3) of which has an outer edge (11), which can be clamped by means of a fastening device to install the pressure sensor at the location of use; a recess (7), which is provided in the front region (3) and is open towards a front side of the front region (3) that faces away from the base (5); a metal measuring diaphragm (9, 9'), to which a pressure (p) to be measured is applied from outside during measurement operation and which can be deformed elastically depending on the pressure, is arranged on the front side of the sensor body (1), closes off the recess (7) from the outside, consists of the same metal as the sensor body (1) and is spaced apart from the outer edge (11) of the front region (3); and an electromagnetic transducer for detection, by means of measurement, of the pressure-dependent deformation of the measuring diaphragm (9, 9'), having at least one measuring element (55, 57), which is electrically isolated from the measuring diaphragm (9, 9') and the sensor body (1) by means of an insulating element (51, 53).

Description

technical field [0001] The invention relates to a pressure sensor and a pressure measuring device equipped with a pressure sensor. Background technique [0002] Pressure sensors are used in pressure measuring devices in almost all areas of industrial measurement technology for the metrological detection of the pressure to be measured. [0003] For this purpose, so-called semiconductor sensors, such as silicon-based pressure sensor chips, are often used today. However, these pressure sensors are mechanically sensitive. For this reason, they cannot be directly exposed to the medium whose pressure is to be measured. Alternatively, a diaphragm seal is arranged upstream of the pressure sensor and transmits the pressure to be measured to the pressure sensor. Diaphragm seals are filled with a pressure transmission fluid such as oil. Because pressure transmission fluids freeze at low temperatures, these pressure sensors can only be used at temperatures well above the freezing po...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L19/14
CPCG01L19/142G01L9/0075
Inventor 雷蒙德·贝谢英·图安·塔姆安德烈亚斯·罗斯贝格埃尔克·施密特
Owner EHNDRESS KHAUZER GMBKH KO KG
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