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Dual-mass-block high sensitivity silicon micro resonant accelerometer structure based on two-level micro-levers

A technology of silicon micro-resonance and double-mass, which is applied in the direction of measurement of acceleration, velocity/acceleration/shock measurement, microstructure technology, etc., can solve the problem of low sensitivity of micro-mechanical accelerometers, large influence of environmental vibration and temperature, and complex structure and other problems to achieve the effect of eliminating vibration coupling, eliminating common mode interference, and improving sensitivity

Inactive Publication Date: 2016-05-25
BEIHANG UNIV +1
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Problems solved by technology

[0006] The technical problem to be solved by the present invention is: to propose a dual-mass high-sensitivity silicon micro-resonant accelerometer structure based on a two-stage micro-lever to solve the problem of low sensitivity, complex structure, environmental vibration and temperature of existing micro-mechanical accelerometers. Highly sensitive acceleration measurement

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  • Dual-mass-block high sensitivity silicon micro resonant accelerometer structure based on two-level micro-levers
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  • Dual-mass-block high sensitivity silicon micro resonant accelerometer structure based on two-level micro-levers

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Embodiment Construction

[0017] The present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0018] like figure 1 As shown, the present invention is a dual-mass high-sensitivity silicon micro-resonance accelerometer structure based on a two-stage micro-lever, which is made by the bulk silicon process of single-crystal silicon, and the accelerometer structure includes a first mass 1 , the second mass 13, the first tuning fork resonator 2, the second tuning fork resonator 14, the first two-stage micro-lever amplification mechanism 4, the second-stage micro-lever amplification mechanism 5, and the third-stage micro-lever amplification mechanism 16 , the fourth-level micro-lever amplification mechanism 17, the first mass support beam 6, the second mass support beam 7, the third mass support beam 18, the fourth mass support beam 19, the first anchor point 3, the third mass support beam Second anchor point 8, third anchor point 9, fourth anch...

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Abstract

The invention provides a dual-mass-block high sensitivity silicon micro resonant accelerometer structure based on two-level micro-levers. The structure comprises mass blocks, two-level micro-lever amplification mechanisms, and tuning fork resonators. Two mass blocks is employed by an accelerometer to sense acceleration, and the accelerometer is connected to the two mass blocks through connecting the support beam of a substrate and a measured object. One end of each of two completely same resonators is fixed to the substrate through an anchor point, and the other end is connected to the mass blocks through the micro-lever mechanisms. Each mass block is connected to two same two-level micro-levers. When the accelerometer is working, the inertia force generated by mass blocks is amplified by the two-level micro-lever mechanisms and then is acted on the tuning fork resonators, the natural vibration frequency is changed, and through detecting the change of the natural frequencies of the tuning fork resonators, a measured acceleration value can be calculated. The dual-mass-block high sensitivity silicon micro resonant accelerometer structure has the advantages of high sensitivity, a large scale, differential detection, good stability, a small size, a simple structure, and the realization of tuning fork vibration coupling suppression, and the structure can be used in the field of aerospace and aviation, automotive, and earthquake monitoring.

Description

technical field [0001] The invention belongs to the technical field of micro-electromechanical systems, and relates to a dual-mass block high-sensitivity silicon micro-resonance type accelerometer structure based on a two-stage micro-lever, which is widely used in the fields of automobile industry, aerospace, earthquake monitoring and the like as a micro-inertial device. Background technique [0002] Micro-machined accelerometer is one of the most successful devices in the micro-electromechanical system. It has a wide range of application prospects in the civilian and military fields, and breeds huge social and economic benefits. The relevant reports on the research of micromachined accelerometers first appeared in the early 1970s. In the 1980s, single-axis micromachined accelerometers were launched. In the late 1990s, multi-axis micromachined accelerometers appeared. ADXL series of micromachined accelerometers from AD Company in the United States It is one of the most repre...

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Application Information

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IPC IPC(8): G01P15/097B81B3/00
CPCB81B3/0078G01P15/097
Inventor 李成王岩温悦王超樊尚春
Owner BEIHANG UNIV
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