Thickness detection device and thickness detection method using same

Abstract

The present invention relates to a thickness detection device. The thickness detection device of the present invention uses a reflectometer (Reflectometer), and is characterized in that it includes: a light source for emitting light; A plurality of frequencies selectively transmits the light and modulates it into light with intensity distribution, and can adjust the wavelength width of the light with intensity distribution; the optical system directs the light modulated by the filter part to the detection object side irradiating, and receiving light reflected from the detection object side; a light detection unit, receiving light passing through the optical system, and obtaining reflectance information; and a control unit, by setting the number of frequency to adjust the wavelength width of the light modulated by the filter part, and detect the thickness of the detection object by comparing the theoretical reflectance information obtained by the light detection part with the reflectance information obtained by the light detection part. The mathematical formula is stored in advance after modeling.

Description

technical field [0001] The present invention relates to a thickness detection device and a thickness detection method using the device, and more specifically to a thickness detection device capable of improving the accuracy of thickness detection regardless of the material of the detection object or the detection position, and the thickness detection device using the device. Detection method. Background technique [0002] The distribution of the thickness of the transparent film commonly used in the LCD and semiconductor fields has a great influence on the subsequent process. Therefore, a device that can monitor the thickness of the transparent film is required in the whole society. [0003] Generally, the thickness of a thin film can be detected by a mechanical method using a probe (stylus) and an optical method, and an interferometer (Interferometer) and a reflectometer (Reflectometer) are widely used as an optical method. [0004] figure 1 It is a conceptual diagram sch...

AI Technical Summary

Problems solved by technology

[0008] However, although it is easy to generate a detected reflectance curve for the center of the detection object in the conventional thickness detection device, the more you move to the edge side of the detection object, the more the reflectance value of the reflectance distribution curve decreases, which may cause difficulty or The problem of not being able to compare with the modeled reflectance distribution curve

[0009] In addition, due to the material characteristics of the detection object, the reflectance value of the reflectance distribution curve detected from the detection object may be too high, making it difficult or impossible to compare with the modeled reflectance distribution curve

[0010] That is, depending on the material of the detection object and the detection position, there is a problem that the detection accuracy of the thickness decreases

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