Two-grade sealing apparatus used for reduced pressure diffusion systems

Abstract

The invention discloses a two-grade sealing apparatus used for reduced pressure diffusion systems. The apparatus comprises a quartz tube, one orifice of the quartz tube is provided with an inner sealing end surface and an outer sealing end surface which are concentric, the inner sealing end surface is connected with a first-grade sliding door body to form a reaction cavity, the outer sealing end surface is connected with a second-grade sealing door body to form a transition cavity, and the second-stage sealing door body is connected with a push balancing assembly used for preventing pressing damages of the second-stage sealing door body to the outer sealing end surface. The two-grade sealing apparatus has the advantages of simple and reliable structure, and prevention of stress damages of the outer sealing end surface.

Description

Technical field [0001] The present invention mainly relates to the sealing technology of reduced-pressure diffusion process equipment, in particular to a secondary sealing device used for a reduced-pressure diffusion system. Background technique [0002] Compared with the traditional high-temperature and atmospheric pressure diffusion / oxidation furnace, the high-temperature and pressure-reduced diffusion / oxidation furnace has high output, good process sheet uniformity, fewer lattice defects, greatly reduced chemical and special gas loss, long maintenance period and convenient maintenance And other advantages, has broad application prospects. Due to the high-temperature vacuum diffusion / oxidation furnace adopting high-temperature negative pressure (about 0.2bar) process, the airtightness of the quartz reaction chamber is particularly critical. Insufficient sealing will cause contamination of quartz tubes, quartz boats, and silicon wafers in high-temperature processes. As the size...

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Problems solved by technology

According to the static force balance, the pressure caused by the pressure difference of about 0.75 bar will act on the outer end surface of the quartz tube. At the same time, the contact area between the outer end surface of the quartz tube and the stainless steel furnace door is much smaller than the contact area between the gas in the transition chamber and the stainless steel furnace door. , so the outer end surface of the quartz tube will bear a lot of pressure, and the quartz material is hard and brittle, brittle, and the outer end surface of the quartz tube is easy to burst under the action of a large external force

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