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Compensator Optical System for Ultra High Precision Concave Aspheric Inspection

An optical system and aspheric surface technology, which is applied in the field of optical systems, can solve the problems of low detection accuracy of aspheric surface shape and non-common optical path measurement error, etc., and achieve the effect of improving detection accuracy, reducing error factors, and reducing design difficulty

Active Publication Date: 2018-07-06
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

[0004] In order to solve the problem of low detection accuracy of aspheric surface shape caused by the introduction of non-common optical path measurement error in the existing compensator optical system, the present invention provides a compensator optical system for ultra-high precision concave aspheric surface detection

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  • Compensator Optical System for Ultra High Precision Concave Aspheric Inspection
  • Compensator Optical System for Ultra High Precision Concave Aspheric Inspection
  • Compensator Optical System for Ultra High Precision Concave Aspheric Inspection

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specific Embodiment approach 1

[0011] Specific implementation mode 1. Combination figure 1 and figure 2 In this embodiment, the compensator optical system for ultra-high-precision concave aspheric detection includes a transmission group 1 , a compensation group 2 and an aspheric concave mirror 3 to be inspected. The transmission group 1 provides transmitted spherical waves, and the compensation group 2 converts the spherical waves provided by the transmission group 1 into aspheric waves matching the aspheric concave mirror 3 to be tested. In order to improve the calibration accuracy and reduce the non-common optical path measurement error, the design value of the transmission spherical wave aberration of transmission group 1 is better than 0.005λRMS (λ@632.8nm); the F / # of the aspheric concave mirror 3 to be tested is 1.8, and the transmission group 1 The F / # of 1 is 3.1, and the F / # of compensation group 2 is 3.7, which can realize the ideal aberration compensation of the aspheric concave mirror compensa...

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Abstract

A compensator optical system for ultra-high-precision concave aspheric surface detection, relating to an optical system that solves the problem of low detection accuracy of aspheric surface shape caused by the introduction of non-common optical path measurement errors in existing compensator optical systems, including transmission group, a compensation group and an aspheric concave mirror to be checked, the transmission group transmits spherical waves, and the compensation group converts the spherical waves provided by the transmission group into aspheric waves matched with the aspheric concave mirror to be checked; the F of the transmission group The / # is 3.1, the F / # of the compensation group is 3.7, and the F / # of the aspheric concave mirror to be tested is 1.8. The compensator optical system described in the present invention reduces the difficulty of compensator design, reduces the difficulty of processing and assembling the compensator, and reduces error factors to improve detection accuracy. Compared with ultra-high-precision aspheric concave mirror detection, the method described in the present invention can Corresponding compensators that meet the requirements of residual wave aberration are provided.

Description

technical field [0001] The invention relates to an optical system, in particular to a compensator optical system for ultra-high-precision concave aspheric detection. Background technique [0002] In the optical system, the use of aspheric elements can correct aberrations, improve image quality, and reduce the number of elements to improve energy efficiency, so the application fields of aspheric optical elements are becoming more and more extensive. In the field of lithography, aspherical elements are commonly used in the design of projection lithography objective lenses to provide more design freedom, reduce system complexity, increase system values ​​and improve system imaging quality. However, aspheric surface detection, especially ultra-high-precision aspheric surface shape detection, has always been a difficult problem in the field of optical detection, and it is also a key factor restricting the application of aspheric components. For the extreme ultraviolet projection...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B27/00
CPCG02B27/0025
Inventor 王丽萍张海涛马冬梅
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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