Method for correcting coaxiality of inner-diameter concentric circles of magnetron
A calibration method and magnetron technology, applied in measuring devices, instruments, metal processing, etc., can solve the problems of inconvenient operation and application, low degree of automation, etc.
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[0034] Below in conjunction with accompanying drawing and specific embodiment, the present invention will be further described:
[0035] Such as figure 1 , figure 2 as well as image 3 The method for calibrating the coaxiality of the concentric circles of the inner diameter of the magnetron in the present invention is mainly applied to a magnetron calibrating machine. The magnetron calibration machine includes a base 100, a first driving device 300, a detection camera 200, a pressing member 500 and a second driving device 400, the first driving device 300, the detection camera 200, the pressing member 500 and the second The driving devices 400 are installed on the base 100 . And the base 100 has a feeding station 110 and a detection station 120, and the base 100 feeding station 110 detection station 120 can be used to install the clamp 140 of the magnetron 600, and the clamp 140 can be installed on the base movably. On the seat 100, the magnetron 600 to be tested is insta...
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